一种基于模态局域化的高性能MEMS静电压传感器  

High-performance MEMS Electrostatic Potential Sensor Based on Mode Localization

作　　者：王子龙 刘向明 高雅浩 彭思敏 修日 杨鹏飞 毋正伟 彭春荣 WANG Zi-long;LIU Xiang-ming;GAO Ya-hao;PENG Si-min;XIU Ri;YANG Peng-fei;WU Zheng-wei;PENG Chun-rong(State Key Laboratory of Transducer Technology,Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing 100190,China;School of Electronic,Electrical and Communication Engineering,University of Chinese Academy of Sciences,Beijing 100049,China;School of Science,Beijing University of Information Technology,Beijing 100192,China)

机构地区：[1]中国科学院空天信息创新研究院传感技术国家重点实验室,北京100190 [2]中国科学院大学电子电气与通信工程学院,北京100049 [3]北京信息科技大学理学院,北京100192

出　　处：《仪表技术与传感器》2021年第10期1-5,共5页Instrument Technique and Sensor

基　　金：国家自然科学基金(62031025,61971398);国家重点研发计划资助(2018YFF01010800);中国科学院科研仪器设备研制项目资助(YJKYYQ20200026,GJJSTD20210004)。

摘　　要：针对表面电势测量应用,研制了一种基于模态局域化的高性能MEMS静电压传感器。传感器敏感结构采用三自由度静电弱耦合硅微机械谐振器结构,用以实现高灵敏电压测量。通过理论计算和有限元仿真,分析了静电压传感器的幅频特性和灵敏度等关键特性,制作了传感器芯片并搭建实验测试平台。测试结果表明,传感器灵敏度达到0.0967/V,线性度6.11%,且该传感器基于振幅比输出的电压灵敏度是基于频率输出的灵敏度的87.9倍,与理论结果一致。For the application of surface potential measurement,a high-performance MEMS static voltage sensor based on mode localization was developed.To achieve high-sensitivity voltage measurement,a new structure of three-degree-of-freedom electrostatic weakly coupled micromechanical resonator was adopted.Through theoretical calculation and finite element analysis,the amplitude frequency characteristics and sensitivity of the static voltage sensor were analyzed,the sensor chip and the experimental test platform was built.The test results show that the sensitivity of the sensor reaches 0.0967/V,the linearity is 6.11%,and the sensitivity of the sensor based on the amplitude ratio output is 87.9 times higher than the sensitivity based on the frequency output,which is consistent with the theoretical results.

关 键 词：静电压传感器 MEMS 模态局域化 三自由度 静电弱耦合 高灵敏度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]