InAs/GaSb超晶格中短波双色探测器新型钝化方法研究  

Novel Passivation Approach of InAs/GaSb Superlattice for Mid-Short Wavelength Dual-Color Infrared Detector

作　　者：张利学[1,2] 鲁星 朱旭波 姚官生[1,2] Zhang Lixue;Lu Xing;Zhu Xubo;Yao Guansheng(China Airborne Missile Academy,Luoyang 471009,China;Aviation Key Laboratory of Science and Technology on Infrared,Luoyang 471009,China;The First Military Representative Office of Air Force Equipment Department in Luoyang,Luoyang 471009,China;Material School,Northwestern Polytechnical University,Xi’an 710072,China)

机构地区：[1]中国空空导弹研究院,河南洛阳471009 [2]红外探测器技术航空科技重点实验室,河南洛阳471009 [3]空装驻洛阳地区第一军事代表室,河南洛阳471009 [4]西北工业大学材料学院,西安710072

出　　处：《航空兵器》2021年第5期110-113,共4页Aero Weaponry

基　　金：航空科学基金项目(201924012001)。

摘　　要：由于InAs/GaSb Ⅱ类超晶格材料有较高的表面态密度,易在表面生成导电氧化层,在将其制备成红外器件的过程中,首先要解决钝化问题。钝化效果和覆盖膜层质量对红外器件的表面漏电和噪声有很大影响。使用阳极氟化加硫化锌的方法,对中短波双色InAs/GaSb超晶格进行钝化,使用俄歇电子能谱测试证实了阳极氟化的可靠性,使用77 K下的J-V测试结果,对比证实了氟化的钝化效果和对漏电流密度的改善效果。结果表明,阳极氟化加硫化锌的钝化方法可以有效抑制漏电。For higher surface state density of InAs/GaSb type Ⅱ superlattice materials,it is easy to form conductive oxide layer on the material surface.The first problem to be solved is passivation in the process of preparing infrared devices with InAs/GaSb superlattice materials.Passivation effect and coating quality have great influence on the surface leakage and noise of infrared devices.The method of zinc sulfide coating after anodic fluorination was used to passivate the mid-short wavelength dual-color InAs/GaSb superlattice.The reliability of anodic fluorination is confirmed by Auger electron spectroscopy.The J-V test results at 77 K are used to verify the passivation effect of fluorination and the improvement effect of leakage current density.The results show that the passivation method of zinc sulfide coating after anodic fluorination can effectively suppress the leakage current.

关 键 词：INAS/GASB超晶格 MBE 表面钝化 双色探测器 阳极氟化 

分 类 号：TJ765.3[兵器科学与技术—武器系统与运用工程]