平面镜子孔径加权拼接检测算法(特邀)  

Subaperture stitching testing to flat mirror based on weighting algorithm(Invited)

作　　者：闫力松 张斌智 王孝坤[3] 黎发志 Yan Lisong;Zhang Binzhi;Wang Xiaokun;Li Fazhi(School of Optical and Electronic Information,Huazhong University of Science and Technology,Wuhan 430074,China;Jihua Laboratory,Foshan 528200,China;Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;College of Railway Transportation,Hunan University of Technology,Zhuzhou 412007,China)

机构地区：[1]华中科技大学光学与电子信息学院,湖北武汉430074 [2]广东省季华实验室,广东佛山528200 [3]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [4]湖南工业大学轨道交通学院,湖南株洲412007

出　　处：《红外与激光工程》2021年第10期10-15,共6页Infrared and Laser Engineering

基　　金：国家自然科学基金(61805089);吉林省科技发展计划(20200401065GX);广东省基础与应用基础研究基金(2020A1515110259)。

摘　　要：为了解决大口径平面反射镜高精度检测问题,建立了一种基于全局优化的子孔径拼接检测数学模型,同时提出了一种拼接因子用于重叠区域取值。基于上述方法,结合工程实例,对一口径为120 mm的平面反射镜完成拼接检测,检测中共规划了四个待测子孔径,为了对比文中所述算法与传统最小二乘拟合拼接算法的拼接性能,分别利用两种算法完成了待测平面镜的面形重构。实验结果表明,两种算法所得拼接结果光滑、连续、无"拼痕",同时分别将两种算法所得拼接结果与全口径检测结果进行了对比分析,从传统拼接算法残差图中可以看到明显的"拼痕",而加权拼接方法得到的拼接结果光滑、连续,同时其残差图的PV与RMS值分别为0.012λ与0.002λ,小于传统算法残差图的PV与RMS值,验证了算法的可靠性与精度。To solve the problem of high-precision testing of large-diameter plane mirrors,a mathematical model of subaperture stitching testing based on global optimization was established,and a stitching factor was proposed for overlapping area values.Based on the above method,combined with engineering examples,the stitching testing of a plane mirror was completed with a diameter of 120 mm,and four subapertures to be tested were planned.In order to compare the stitching performance of the algorithm described in this paper with the traditional least-squared fitting stitching algorithm,two algorithms were used to complete the surface reconstruction of the plane mirror to be measured.The experimental results show that the stitching results obtained by the two algorithms are smooth,continuous,no"stitch marks".At the same time,the results of the two algorithms are also compared with the full-aperture testing results.In this paper,obvious"stitch marks"can be seen in the residual map of the traditional splicing algorithm,and the stitching results obtained by the algorithm method in this paper are smooth and continuous,while the PV and RMS values of the residual graph are 0.012λand 0.002λ,respectively,which are less than the PV and RMS values of the traditional algorithm residuals chart,which verifies the reliability and accuracy of the algorithm.

关 键 词：光学检测 干涉测量 子孔径拼接 拼接因子 

分 类 号：O439[机械工程—光学工程] O436.1[理学—光学]