夏克哈特曼扫描拼接检测平面镜(特邀)  

Shack-Hartmann scanning and stiching detection plane mirror(Invited)

作　　者：王晶[1,2] 王孝坤 胡海翔[1,2] 李凌众 苏航[1,2] Wang Jing;Wang Xiaokun;Hu Haixiang;Li Lingzhong;Su Hang(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;Univesity of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《红外与激光工程》2021年第10期59-65,共7页Infrared and Laser Engineering

基　　金：吉林省科技发展计划(20200401065GX);中国科学院青年创新促进会(2019221);国家自然科学基金(61975201);国家自然科学基金面上项目(6207031149)。

摘　　要：随着先进光学系统设计与制造的发展,大口径光学系统得到了广泛的应用。然而,大口径平面镜高精度面形的检测手段不足,限制了大口径平面镜的制造与应用。为实现大口径平面反射镜的高精度面形检测,提出一种夏克哈特曼扫描拼接检测平面镜面形的方法。对扫描拼接原理、波前重构算法进行了研究,建立了微透镜阵列成像的数学模型,验证了夏克哈特曼扫描拼接检测原理的可行性。针对一口径为150 mm的平面镜进行了扫描拼接检测实验,拼接得到的全口径面形为0.019λRMS(λ=635 nm);与干涉检测结果对比,检测精度为0.008λRMS,结果表明该方法能够实现大口径平面反射镜的高精度检测。With the development of advanced optical system design and manufacturing, large aperture optical system has been widely used. However, the lack of high precision surface shape detection means limits the manufacture and application of large aperture plane mirrors. In order to detect the surface shape of large aperture planar mirror with high precision, a Shack-Hartmann scanning and stiching detection method was proposed. The scanning and stiching principle and wavefront reconstruction algorithm were studied, and the mathematical model of microlens array imaging was established to verify the feasibility of Shack-Hartmann scanning and stiching detection principle. A scanning and stiching test experiment was carried out for a 150 mm aperture plane mirror,the full aperture surface shape 0.019λ RMS(λ=635 nm) was obtained. Compared with the results of interference detection, the detection accuracy was 0.008λ RMS. The results show that the method can realize the high precision detection of large aperture planar mirror.

关 键 词：光学检测 平面镜 面形误差 扫描拼接 夏克哈特曼 

分 类 号：O439[机械工程—光学工程] O436.1[理学—光学]