X射线聚焦镜的超精密制造  

Ultra-precision manufacture of X-ray focusing mirror

作　　者：王波[1] 杨彦佶[2] 王殿龙[1] 王浪平[1] 李铎[1] 乔政[1] 丁飞[1] 薛家岱 廖秋岩 WANG Bo;YANG Yan-ji;WANG Dian-long;WANG Lang-ping;LI Duo;QIAO Zheng;DING Fei;XUE JIA-dai;LIAO QIU-yan(Harbin Institute of Technology,Harbin 150000,China;Key Laboratory for Particle Astrophysics,Institute of High Energy Physics,Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]哈尔滨工业大学,黑龙江哈尔滨150001 [2]中国科学院高能物理研究所中国科学院粒子天体物理重点实验室,北京100049

出　　处：《光学精密工程》2021年第8期1839-1846,共8页Optics and Precision Engineering

基　　金：中国科学院战略性先导科技专项(No.XDA15020501-03)。

摘　　要：X射线聚焦镜用于收集和汇聚宇宙中X射线辐射,是X射线天文卫星观测载荷的核心部件。本文采用镍基底电铸复制方法,在包括化学镀镍磷合金、模具超精密加工、模具镀膜、电铸镍基体以及脱模的全工艺链上进行了大量工艺探索和装备研发,并最终完成了X射线聚焦镜的批量超精密制造。实验结果表明,聚焦镜模具加工精度-表面粗糙度小于0.5 nm RMS,面形精度优于0.5μm,镜片角分辨率为33.5″HPD(能量半高宽),验证了工艺的可靠性和先进性。An X-ray focusing mirror is used to collect X-ray radiation in the universe,and is the core component of an X-ray astronomical satellite observation payload. In this study,process exploration and equipment research and development are conducted on the entire process chain(including electroless nickelphosphorus alloy plating,mold ultra-precision machining,mold coating,electroforming nickel matrix,and demodulator)using the electroforming replication method of a nickel substrate,and finally,the batch ultra-precision manufacturing of X-ray focusing mirrors is completed. The results indicate that the surface roughness of the focusing lens mold processing precision is less than 0. 5 nm RMS,surface shape precision is better than 0. 5 m,and lens Angle resolution is 33. 5″(half-power diameter),thus validating the reliability of the process. The study findings are expected to provide important technical support for China’s space X-ray observation,break the foreign monopoly,and significantly improve China’s astronomical observation ability in the field of high-energy celestial bodies.

关 键 词：X射线光学 Wolter聚焦望远镜 掠入射 电铸复制 超精密加工 

分 类 号：TQ171.6[化学工程—玻璃工业]