宽频带电磁式角振动校准系统研究进展  

Research Progress on Broadband Electromagnetic Angular Vibration Calibration System

作　　者：唐波[1,2] 何闻 刘爱东[3] TANG Bo;HE Wen;LIU Ai-dong(Zhejiang Province Key Laboratory of Advanced Manufacturing Technology,Zhejiang University,Hangzhou,Zhejiang 310027,China;College of Metrology and Measurement Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China;National Institute of Metrology,Beijing 100029,China)

机构地区：[1]浙江大学浙江省先进制造技术重点实验室,浙江杭州310027 [2]中国计量大学计量测试工程学院,浙江杭州310018 [3]中国计量科学研究院,北京100029

出　　处：《计量学报》2021年第10期1328-1334,共7页Acta Metrologica Sinica

基　　金：国家重点研发计划(2019YFC1509503);国家自然科学基金(11872061);浙江省自然科学基金(LY21E050017);国家市场监督管理总局科技计划(2019MK103,2020MK189)。

摘　　要：在分析激光干涉测量法基础上,阐述了A类和B类激光干涉角振动测量的系统组成、测量原理、数据处理和测量范围,特别指出角振动台性能直接影响角振动校准结果。在此基础上,分析了角振动台国内外研究现状,指出各种类型的性能参数、应用范围和局限性。建立了宽频带角振动台的机电耦合方程,对其所涉及的高扭振频率运动部件设计技术、强而均匀气隙磁场磁路结构设计技术及可调电粘弹性支撑装置设计技术等关键技术进行了深入分析,并给出了相应的研究思路和建议。On the basis of analyzing laser interferometry,the system composition,principle of measurement,data processing and measurement range for the angular vibration measurement method of A-type and B-type laser interferometry are described systematically,and it is especially pointed out that the performance of angular vibrators directly affects the angular vibration calibration result. On this basis,the research status and progress of angular vibrators are analyzed at home and abroad,and the specifications,application scopes and limitations of different types are pointed out. Finally,the electromechanical coupling equation of broadband angular vibrators is established,and the key techniques involved,such as design technology of a moving component with high torsional resonant frequency,design technology of a magnetic circuit structure with strong and uniform air gap magnetic field and design technology of an adjustable electro-viscoelastic-support device,are analyzed in depth,and the corresponding research ideas and suggestions are given.

关 键 词：计量学 角振动传感器 角振动台 激光干涉仪 校准装置 

分 类 号：TB936[一般工业技术—计量学] TM359.9[机械工程—测试计量技术及仪器]