TiN涂层及其抑制结焦性能的研究  

Investigation of TiN coating and its anti-coking performance

作　　者：康涛[1] 朱权[1] KANG Tao;ZHU Quan(School of Chemical Engineering,Sichuan University,Chengdu 610065,China)

机构地区：[1]四川大学化学工程学院,四川成都610065

出　　处：《化学研究与应用》2021年第11期2247-2252,共6页Chemical Research and Application

基　　金：国家自然科学项目(92060101)资助。

摘　　要：本文对TiCl_(4)-NH_(3)-H_(2)反应体系在500℃条件下沉积氮化钛涂层生长速率随沉积时间的变化情况,以及不同厚度涂层的形貌和抑制结焦效果进行了研究。通过扫描电镜对样品截面进行观察,测得0-60 min沉积时间段涂层平均生长速率6 nm·min^(-1),60-90 min涂层平均生长速率22 nm·min^(-1),90-120 min涂层平均生长速率19 nm·min^(-1)。表面形貌分析则表明,随着涂层厚度的增加,透镜状晶粒逐渐布满涂层表面,而涂层生长速度也同时增大。程序升温氧化(TPO)曲线和积碳形貌观察结果说明,随着涂层厚度增加,积碳氧化难度下降,TPO曲线峰值温度从355 nm涂层的693℃下降到1600 nm涂层的626℃;积碳量也随着涂层厚度的增加而减少,从空白310S样品的2.369 mg/cm^(2)下降到1600 nm涂层的0.191 mg/cm^(2)。当涂层厚度达到1600 nm,抑制结焦率达到91.9%。In order to obtain the optimal thickness of TiN coating,which is deposited by TiCl_(4)-NH_(3)-H_(2) system at 500℃,the growth rates,morphologies and the anti-coking ratios of coatings with different thickness were studied in this work.The average coating growth rate of 0-60 min depositional period is 6 nm·min^(-1),60-90 min depositional period is 22 nm·min^(-1),and 90-120 min depositional period is 19 nm·min^(-1).From the morphology analysis,it is observed that the lenticular grains gradually spread over the surface of the coating as the increase of the coating thickness,and the growth rate of the coating also increases at almost the same time.According to the temperature-programmed oxidation(TPO)curve and coke morphologies,it is shown that the difficulty of coke oxidation decreases with the increase of coating thickness,and the peak temperature of TPO curve decreases from 693℃for 355 nm coating to 626℃for 1600 nm coating.The amount of coke also decrease with the increase of coating thickness,which decreased from 2.37 mg/cm^(2) of blank 310S sample to 0.19 mg/cm^(2) of 1600 nm coated sample.When the coating thickness reaches 1600nm,the anti-coking ratio reaches 91.9%.

关 键 词：氮化钛涂层 环己烷 抑制结焦 程序升温氧化 化学气相沉积 

分 类 号：O614.4[理学—无机化学]