MOCVD设备射频感应加热原理与故障分析  

MOCVD RF Induction Heating Technology and Faults Analysis of the Equipment

作　　者：刘成群 程壹涛 刘宇宁 LIU Chengqun;CHENG Yitao;LIU Yuning(The 13^(th) Research Institute of CETC,Shijiazhuang 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所,河北石家庄050051

出　　处：《电子工业专用设备》2021年第5期16-21,共6页Equipment for Electronic Products Manufacturing

摘　　要：介绍了MOCVD设备射频感应加热系统的工作原理及技术特点。结合射频感应加热系统的组成,详细叙述各主要模块的典型故障及维修技术,重点分析射频功率源电路故障及维修。针对射频系统阻抗失配现象,提出了阻抗匹配调整的实用方法。根据多年的设备维护经验,归纳MOCVD设备射频感应加热系统的常见故障,给出了快速检查处理措施。The working principle and technical characteristics of the RF induction heating system of MOCVD are introduced.Combined with the composition of the RF induction heating system,the typical faults and maintenance technology of each main module are described in detail,and the RF power source circuit faults and maintenance are analyzed emphatically.Aiming at the impedance mismatch of RF system,a practical method of impedance matching adjustment is proposed.Based on the experience of equipment maintenance for many years,the common faults of the RF induction heating system of MOCVD equipment are summarized,and the fast inspection and treatment measures are given.

关 键 词：金属有机物化学气相淀积 射频感应加热 阻抗匹配 振荡器 

分 类 号：TN304.055[电子电信—物理电子学]