多层微图案成像特性的研究  

Study on Imaging Characteristics of Multilayer Micropatterns

作　　者：莫之畅 魏劲松[2] 曹清[1] Mo Zhichang;Wei Jingsong;Cao Qing(College of Sciences,Shanghai University,Shanghai 200444,China;Laboratory of Micro-Nano Optoelectronic Materials and Devices,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China)

机构地区：[1]上海大学理学院,上海200444 [2]中国科学院上海光学精密机械研究所微纳光电子功能材料实验室,上海201800

出　　处：《光学学报》2021年第20期36-45,共10页Acta Optica Sinica

基　　金：国家自然科学基金(51672292,61627826)。

摘　　要：研究了多层微图案的成像特性,将基于光刻技术制作的微米级和高透光微图案附着在透明玻璃基板上,这种带有图案的玻璃基板堆叠约50层后能由光学显微镜进行多层成像,最终的成像质量呈上层清楚下层模糊的特点。通过光场分析排除邻近层的串扰和照明对成像结果的影响,通过研究玻璃基片的厚度、层数,分析了像差对成像结果的影响,并定量分析了层间反射作为主要噪声在成像物场上的分布。最后,提出了一种优化方案,采用降低界面反射,增进噪声吸收及图像处理的方式提高信噪比,恢复底层不清晰图案。该研究可对日益增长的文档等信息进行备份存放和成像观察,有效提高了空间利用率。In this paper, the imaging characteristics of multilayer micropatterns are studied. Micropatterns at micron scale with high light transmittance prepared via photolithography are attached to transparent glass substrates. The patterned glass substrates are in turn stacked together to around 50 layers and imaged by an optical microscope. The final image is clear on the upper layers and fuzzy on the lower layers. Through a light field analysis, the influences of crosstalk caused by adjacent layers and illumination on the imaging results are eliminated. The influence of aberrations is examined through thickness and number variations of the glass substrates. In addition, the object field distribution of interlayer reflection, the main noise in this imaging system, is quantitatively analyzed. Finally, an optimization solution is proposed, namely, to improve the signal-to-noise ratio and thus restore the unclear patterns of the lower layers by reducing interface reflection, enhancing noise absorption, and optimizing image processing. This research can facilitate the backup, imaging, and observation of the growing number of documents and thereby effectively enhance space utilization.

关 键 词：成像系统 光刻技术 多层成像 微图案 成像分析 文档备份 

分 类 号：O436[机械工程—光学工程]