基于夏克-哈特曼传感器的计算机辅助装调方法  

Computer-Aided Alignment Method Based on Shack-Hartmann Sensor

作　　者：吴伟 罗自荣 于乃辉 尚建忠[1] Wu Wei;Luo Zirong;Yu Naihui;Shang Jianzhong(College of Intelligence Science and Technology,National University of Defense Technology,Changsha,Hunan 410073,China;The PLA Unit 31636,Kunming,Yunnan 650300,China)

机构地区：[1]国防科技大学智能科学学院,湖南长沙410073 [2]中国人民解放军31636部队,云南昆明650300

出　　处：《光学学报》2021年第20期131-137,共7页Acta Optica Sinica

基　　金：国家自然科学基金(51675527)。

摘　　要：夏克-哈特曼传感器是自适应光学中应用最广泛的波前传感器,它不仅可以测量大气湍流引起的畸变,还可以测量由风、温度变化和机械应力产生的镜面位置误差引起的像差。基于夏克-哈特曼传感器,推导了子孔径斜率与装配误差之间的函数关系,提出了一种基于光学系统失调前后点阵光斑质心偏差信息的计算机辅助装调方法,将装配误差求解问题转换成多目标优化问题,可采用多目标智能优化算法进行求解该问题。以某三反光学系统为例,基于Python和Zemax联合仿真进行模拟装调,仿真结果表明,经三次迭代可将失调误差校正到微米级,这可满足实际装调需求,结果验证了所提方法的正确性。As the most widely used wavefront sensors in adaptive optics, Shack-Hartmann sensors can measure not only the distortions caused by atmospheric turbulence, but also the aberrations brought by mirror position errors, which are usually introduced by wind, temperature change, and mechanical stress. In this paper, we established the functional relation between the subaperture slope and misalignment based on the Shack-Hartmann sensor, and then developed a computer-aided alignment method based on the centroid deviation of lattice spots before and after optical system misalignment. This method converts the misalignment calculation into multi-objective optimization, which can be solved by multi-objective intelligence optimization algorithms. Using a three-mirror optical system as an example, the co-simulation with Python and Zemax was conducted for alignment. The simulation results show that the misalignments are reduced to the micron level after three iterations, which can meet the practical alignment requirements. The simulation results demonstrated the correctness of the proposed method.

关 键 词：光学设计 计算机辅助装调 夏克-哈特曼传感器 失调计算 主动光学 光学装调 

分 类 号：TH743[机械工程—光学工程]