0.2nm带宽滤光片的制备以及退火温度对其形貌和性能的影响  

Fabrication of 0.2 nm Bandwidth Filter and Effects of Annealing Temperature on Its Morphology and Characteristics

作　　者：王凯旋[1,2,3] 陈刚 刘定权[1,2,3] 马冲 张秋玉[1,2,3] 高凌山 Wang Kaixuan;Chen Gang;Liu Dingquan;Ma Chong;Zhang Qiuyu;Gao Lingshan(Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;School of Physical Science and Technology,ShanghaiTech University,Shanghai 200031,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院上海技术物理研究所,上海200083 [2]上海科技大学物质学院,上海200031 [3]中国科学院大学,北京100049

出　　处：《光学学报》2021年第20期217-223,共7页Acta Optica Sinica

基　　金：上海市自然科学基金(17ZR1434900)。

摘　　要：近红外波长为1.064μm的激光是激光测距、自由空间光通信和空间光学遥感等应用中的主要激光光源之一。窄带滤光片是抑制背景光干扰的关键元件之一,目前大部分滤光片的半峰全宽为几纳米。本文研制了中心波长为(1064±0.05) nm、半峰全宽为0.19 nm、峰值透过率可达70.2%的带通滤光片,并考察了不同温度(100,200,300℃)退火处理后滤光片的表面形貌和光谱特性的变化。实验结果表明:滤光片的表面光滑,受退火温度的影响很小;滤光片的透射光谱随着退火温度的升高向长波方向移动,在100℃退火处理3 h的滤光片的光谱漂移量为0.03 nm,说明该滤光片可在温控条件有限的空间光学系统中使用。The near-infrared laser with a wavelength of 1.064 μm is one of the main laser sources for laser ranging, free-space optical communication, and space optical remote sensing. Narrowband filters are one of the key components that suppress background light interference. At present, the full widths at half maximum of most filters are several nanometers. An ultra-narrow band-pass filter was designed and fabricated, which had a full width at half maximum of 0.19 nm, a peak transmittance of 70.2%, and a central wavelength of(1064±0.05) nm. Then it was annealed at 100 ℃, 200 ℃, and 300 ℃, respectively, and changes in its surface morphology and spectral characteristics were investigated. The experimental results indicate that the surface of the filter is smooth and annealing has little influence on it. In contrast, the transmission spectrum of the filter undergoes redshift as the annealing temperature rises. When annealed at 100 ℃ for 3 h, the filter experiences a spectral shift of 0.03 nm, which shows that the filter is suitable for space optical systems with limited temperature control.

关 键 词：薄膜 亚纳米带宽滤光片 离子束溅射沉积 近红外波段 退火温度 

分 类 号：O439[机械工程—光学工程]