硅基与石墨烯基谐振式压力传感器研究进展  

Research Progress of Resonant Pressure Sensors Based on Silicon and Graphene

作　　者：刘冠军[1] 徐方松 刘瑛 郑贤德 王钦 邱静[1] LIU Guan-jun;XU Fang-song;LIU Ying;ZHENG Xian-de;WANG Qin;QIU Jing(College of Intelligence Science and Technology,National University of Defense Technology,Changsha 410000,China)

机构地区：[1]国防科技大学智能科学学院,湖南长沙410000

出　　处：《测控技术》2021年第11期1-10,共10页Measurement & Control Technology

基　　金：国家自然科学基金资助项目(5167562);重点实验室基金(6142215200304,6142003190202)。

摘　　要：谐振式压力传感器具有优异的传感性能,在航空航天、工业自动化控制等领域有着广泛的应用,开展谐振式压力传感器相关研究具有重要意义。简述了压力传感器标准指标体系,为传感器性能评价提供基础依据,回顾了近20年内硅基谐振式压力传感器(Silicon Resonant Pressure Sensor,SRPS)的研究成果。石墨烯作为单原子层天然纳米材料,被认为是研制压力传感器的理想材料。进一步总结了石墨烯基谐振式压力传感器(Graphene Resonant Pressure Sensor,GRPS)的最新研究进展,已有研究结果表明GRPS灵敏度普遍比SRPS高1~2个数量级。提取文献中实验数据估算当前GRPS线性度和精度指标,分析结果表明,当前GRPS与SRPS性能指标差距明显。基于此,指出了GRPS的不足,提出解决路线。Resonant pressure sensors have been widely applied in aerospace and industrial automation control due to the excellent sensing performance.It is of great significance to carry out research on resonant pressure sensors.The standard and uniform indexes of pressure sensors are described to evaluate the performance of the sensors.Furthermore,the research on silicon resonant pressure sensors(SRPS)in the last 20 years are reviewed.As a single atomic layer natural nanomaterial,graphene is considered to be an ideal material for the fabricating of pressure sensors.The study on graphene resonant pressure sensors(GRPS)in recent years is further summarized,which indicates that the sensitivity of GRPS is generally 1~2 orders of magnitude higher than that of SRPS.Experimental data from the literature are extracted to estimate the linearity and accuracy indicators of the GRPS.The results show that the performance of GRPS is far below the SRPS on the mentioned indicators.The key problems of GRPS are pointed out and the solution is put forward.

关 键 词：压力传感器 谐振式 性能指标 石墨烯 MEMS 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]