MEMS惯性开关的原理及研究进展  

Principle and Recent Progress of MEMS Inertial Switch

作　　者：任超 刘峰华[2] 付博 康兴国[2] 丁桂甫[1] 杨卓青[1] REN Chao;LIU Feng-hua;FU Bo;KANG Xing-guo;DING Gui-fu;YANG Zhuo-qing(National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Shanghai Jiao Tong University,Shanghai 200240,China;Xi'an Institute of Electromechanical Information Technology,Xi'an 710065,China;MEMS Center,Huaihai Industries Group Co.,Ltd.,Changzhi 046012,China)

机构地区：[1]上海交通大学微米/纳米加工技术国家级重点实验室,上海200240 [2]西安机电信息技术研究所,陕西西安710065 [3]淮海工业集团有限公司MEMS中心,山西长治046012

出　　处：《测控技术》2021年第11期16-32,共17页Measurement & Control Technology

基　　金：国家重点研发计划(2020YFB2008503);装备预研教育部联合基金(6141A02022424);国家自然科学基金项目(61974088)。

摘　　要：MEMS惯性开关是一种无源电子器件,集传感器与执行器为一体,具有尺寸小、制造成本低、可批量生产等多种优点,在玩具、汽车电子、物联网和军事等领域有着广泛的应用前景。由于惯性开关具有在未触发状态时待机功耗为零的特点,其在远程监控等电量有限的应用场景下有着明显的优势。介绍了MEMS惯性开关的基本物理模型和工作原理,并对影响器件工作效果的重要性能参数进行了分析。根据器件的导通方式、接触增强的设计方法、开关的敏感冲击方向和敏感的阈值大小,对国内外研究的惯性开关进行了分类和阐述。此外,还讨论了MEMS惯性开关的微加工工艺和测试。对MEMS惯性开关器件进行了相应的总结和展望,为之后的研究提供了参考。As a passive electric device,MEMS inertial switches have the functions of both sensing and actuating,which are widely used in toys,automotive electronics,IoT systems,military and other fields due to many advantages such as small size,low costs and mass production.The power consumption of the inertial switch under the normal state is zero,so it has obvious advantages when used in the case of very limited power.The basic physical model and the working principle of MEMS inertial switch are introduced,and the important parameters that affect the working performances are analyzed.According to conduction mode,mechanism of contact-enhancement,sensitive direction and acceleration threshold,the current inertial switches studied at home and abroad are classified and explained.Furthermore,the related micromachining technologies and test methods are also discussed.Finally,a brief summary and prospect of the MEMS inertial switches are proposed to provide a reference for the following research.

关 键 词：MEMS惯性开关 物理模型 研究进展 微加工工艺 测试方法 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置] TM564[自动化与计算机技术—控制科学与工程]