SiC晶须和SU-8复合增强的MEMS惯性开关研究  

MEMS Inertial Switch with SiC Whisker Reinforced SU-8 Composite Structure

作　　者：郑玮 李亚辉 刘扬 张浩东 杨卓青[1] ZHENG Wei;LI Ya-hui;LIU Yang;ZHANG Hao-dong;YANG Zhuo-qing(National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Shanghai Jiao Tong University,Shanghai 200240,China;Department of Micro/Nano Electronics,School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区：[1]上海交通大学微米/纳米加工技术国家级重点实验室,上海200240 [2]上海交通大学电子信息与电气工程学院微纳电子学系,上海200240

出　　处：《测控技术》2021年第11期57-63,共7页Measurement & Control Technology

基　　金：国家自然科学基金(619744088);国家重点研发计划(2020YFB2008503);装备预研教育部联合基金(6141A02022424)。

摘　　要：MEMS惯性开关是通过检测外界的加速度来控制电路通断的器件,在测试控制、消费电子、生物医疗等领域都有较为广泛的应用。之前对惯性开关研究多偏向于性能角度,例如增强接触时间或可以感应多个方向加速度,而忽略了惯性开关中材料的创新性。SU-8负性光刻胶和SiC晶须因其在微机电系统加工技术中的良好表现而引起关注,因此采用SiC晶须掺杂的SU-8负性光刻胶作为MEMS惯性开关可动电极,通过牺牲层工艺将可动电极从基底上脱离之后与固定电极组合构成惯性开关。对掺杂前后的SU-8材料进行了杨氏模量等力学参数的测试,并对制作的惯性开关器件进行了仿真和阈值加速度测试,结果显示掺杂2wt%的SiC晶须之后,增强复合材料的杨氏模量相比纯SU-8胶提高了12%,惯性开关的阈值加速度提高了20%。MEMS inertial switch is a device that controls the circuits on and off by detecting the external acceleration.It is widely used in test control,consumer electronics,biomedical and other fields.Previous studies on inertial switches tended to focus on performance,such as enhancing contact time or sensing acceleration in multiple directions,while ignoring the innovation of materials in inertial switches.SU-8 negative photoresist and SiC whisker have been noticed for their good performance in MEMS processing technology.Therefore,SU-8 negative photoresist doped with SiC whisker is used as the movable electrode of the MEMS inertial switch,and the movable electrode is separated from the substrate by sacrificial layer process.The mechanical parameters such as Young’s modulus of the doped and undoped SU-8 are tested,and the inertial switch device is simulated and the threshold acceleration is tested.The results show that the Young’s modulus of the reinforced composite is increased by 12%compared with that of the pure SU-8 adhesive,and the threshold acceleration of the inertial switch is increased by 20%after doping 2 wt%SiC whisker.

关 键 词：MEMS惯性开关 SU-8光刻胶 SIC晶须 阈值加速度 

分 类 号：TN305[电子电信—物理电子学]