薄膜铌酸锂电光调制器研究进展  

Research Progress of Thin-film Lithium Niobate Electro-optic Modulators

作　　者：秦妍妍 吴立枢 陈泽贤[1,3] 钱广 张晓阳 张彤[1,3] QIN Yanyan;WU Lishu;CHEN Zexian;QIAN Guang;ZHANG Xiaoyang;ZHANG Tong(Joint International Research Laboratory of Information Display and Visualization,School of Electronic Science and Engineering,Southeast University,Nanjing 210096,CHN;Science and Technology on Monolithic Integrated Circuits and Modules Laboratory,Nanjing Electronic Devices Institute,Nanjing 210016,CHN;Suzhou Key Laboratory of Metal Nanooptoelectronic Technology,Southeast University,Suzhou Campus,Suzhou Jiangsu 215123,CHN)

机构地区：[1]东南大学电子科学与工程学院,信息显示与可视化国际合作联合实验室,南京210096 [2]南京电子器件研究所,微波毫米波单片集成和模块电路重点实验室,南京210016 [3]东南大学苏州校区,苏州金属纳米光电技术重点实验室,江苏苏州215123

出　　处：《光电子技术》2021年第3期159-166,共8页Optoelectronic Technology

基　　金：微波毫米波单片集成和模块电路重点实验室基金资助项目(614280304011901)。

摘　　要：从铌酸锂电光调制器的工作原理出发,介绍了不同种类的薄膜铌酸锂波导技术和近年来部分具有代表性的薄膜铌酸锂电光调制器研究进展,并对未来发展所面临的挑战和前景进行了展望。The operating mechanism of LN electro-optic modulators was introduced in the beginning.Then different fabrication technologies of thin-film LN waveguides and several representative advancements of integrated electro-optic modulators were emphatically reviewed.Finally,challenges and opportunities of the thin-film LN modulators were discussed.

关 键 词：薄膜铌酸锂 电光调制器 光子集成 

分 类 号：TN256[电子电信—物理电子学]