真空镀膜机用小型磁性液体密封设计  

Design of magnetic fluid seal of small vacuum coating machine

作　　者：于文娟 李德才[1,2] 李艳文 张志力[1] 董珈皓 YU Wenjuan;LI Decai;LI Yanwen;ZHANG Zhili;DONG Jiahao(School of Mechanical Electronic and Control Engineering,Beijing Jiaotong University,Beijing 100044,China;State Key Laboratory of Tribology,Tsinghua University,Beijing 100084,China)

机构地区：[1]北京交通大学机械与电子控制工程学院,北京100044 [2]清华大学摩擦学国家重点实验室,北京100084

出　　处：《北京交通大学学报》2021年第5期124-129,共6页JOURNAL OF BEIJING JIAOTONG UNIVERSITY

基　　金：国家自然科学基金(51735006,U1837206,51927810);北京市自然科学基金(3182013)。

摘　　要：真空镀膜机的传动控制轴处密封通常采用的是接触式机械密封,易磨损、寿命短、制作工艺繁琐、造价高.本文设计了小轴径真空镀膜机用的磁性液体密封结构,对磁性液体密封结构的磁场进行了有限元分析,得到了密封结构的磁场分布,以及密封结构的极齿处磁场强度值.由磁性液体运动方程推导了伯努利方程,确定了磁性液体密封边界条件,推导了磁性液体密封结构的耐压公式,计算了极齿与转轴不同间隙的真空镀膜机磁性液体密封结构的耐压值,加工了间隙为0.1 mm的磁性液体密封装置,应用在真空镀膜机的转动轴动密封处,满足真空度要求.The sealing at the transmission control shaft of the vacuum coating machine usually adopts the contact mechanical seal, which is prone to wear and suffers from short life, complicated manufacturing process, and high cost. In this paper, a magnetic fluid sealing structure is designed for the vacuum coating machine with a small shaft diameter, and the magnetic field of the magnetic fluid sealing structure is analyzed by finite element analysis. Thus, the magnetic field distribution and the magnetic field intensity value at the pole teeth of the sealing structure are obtained. The Bernoulli equation is derived from the magnetic fluid motion equation, the boundary conditions of the magnetic fluid seal are determined, the pressure resistance formula of the magnetic fluid seal structure is deduced, and the pressure resistance of the magnetic fluid seal structure of the vacuum coating machine with different clearances between the pole teeth and the rotating shaft is calculated. The magnetic fluid sealing device with a clearance of 0.1 mm is processed and applied to the dynamic seal of the rotating shaft of the vacuum coating machine, which has meet the vacuum degree requirements.

关 键 词：密封 磁性液体 有限元 真空镀膜机 

分 类 号：TB43[一般工业技术]