激光波长/频率对SiC纳米晶须原位照射生长的影响  

Effect of Laser Wavelength and Frequency on SiC Nano-whisker by In-situ Irradiation Growth

作　　者：刘艳艳[1] 杜长星[1] 吕非 肖猛 高雪松 Liu Yanyan;Du Changxing;Lyu Fei;Xiao Meng;Gao Xuesong(College of Intelligent Manufacturing,Nanjing University of Science Technology ZiJin College,Jiangsu Nanjing 210046;Nanjing University of Aeronautics and Astronautics,Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology,Jiangsu Nanjing 210016;Laser Equipment and Machining Technology R&D Center,Nanjing Institute of Advanced Laser)

机构地区：[1]南京理工大学紫金学院智能制造学院,江苏南京210046 [2]南京航空航天大学江苏省精密与微细制造技术重点实验室,江苏南京210016 [3]南京先进激光技术研究院激光装备及工艺技术研发中心,江苏南京210038

出　　处：《南方农机》2021年第24期1-3,7,共4页

基　　金：江苏省精密与微细制造技术重点实验室开放基金项目(2020016);南京理工大学紫金学院校级科学研究项目(2020ZRKX0401001)。

摘　　要：分别以CO2气体激光和Nd:YAG固体激光为热源,进行SiC纳米晶须原位照射生长的试验,用扫描电子显微镜(SEM)和X射线衍射仪(XRD)分析了晶须的微观形貌和相的组成,研究了不同波长、频率激光照射下晶须的生成条件及晶须形态差异。结果表明:两种不同类型波长和频率的激光照射均能原位生成SiC纳米晶须;激光波长对纳米晶须的生成没有明显影响,激光功率密度、扫描速度、脉冲频率决定晶须的生成及其结构形态;连续模式、10.6μm波长的CO2气体激光作用下,晶须呈棒状结构,表面光滑,粗细均匀,长径比大;脉冲模式、1064 nm波长的Nd:YAG固体激光作用下,晶须形状不规则,数量多,个体小;激光波长/频率不影响晶须的晶体结构和物相组成。The experiments of in-situ irradiation growth of the SiC nano-whiskers by continuous CO2 laser and pulsed Nd:YAG laser were performed respectively.The microstructure and phase composition of SiC nano-whiskers were analyzed by means of the scanning electron microscopy(SEM)and X-ray diffraction(XRD).And then,the generating conditions and morphology of nano-whiskers were studied.The results show that the nano-whiskers can be generated by two types of lasers.The power density of laser,scanning velocity,pulse frequency are the determinant of whisker formation and morphology,however,the influence of laser wavelength is not obvious.The whisker morphology produced by CO2 laser in continuous mode and 10.6μm wavelength is virgulate,with uniform diameter,smooth surface and great ratio of length to diameter.However,there are more whiskers with irregular shape and smaller diameter in the sample irradiated by Nd:YAG laser in pulsed mode and 1064 nm wavelength.The laser wavelength/frequency does not effect the whisker microstructure and phase composition.

关 键 词：激光照射 纳米晶须 原位生长 SIC 晶须形态 

分 类 号：TB321[一般工业技术—材料科学与工程]