收发分体式四自由度激光测量系统耦合误差建模与补偿  

Coupling Error Modeling and Compensation of Transceiver Split Laser Four-degree-of-freedom Error Measurement System

作　　者：程真英[1,2] 梅寒冰 刘欣 雷英俊[1,2] 李瑞君 CHENG Zhen-ying;MEI Han-bing;LIU Xin;LEI Ying-jun;LI Rui-jun(School of Instrument Science and Optoelectronics Engineering,Hefei University of Technology,Hefei,Anhui 230009,China;Anhui Province Key Laboratory of Measuring Theory and Precision Instrument,Hefei University of Technology,Hefei,Anhui 230009,China)

机构地区：[1]合肥工业大学仪器科学与光电工程学院,安徽合肥230009 [2]合肥工业大学测量理论与精密仪器安徽省重点实验室,安徽合肥230009

出　　处：《计量学报》2021年第11期1409-1417,共9页Acta Metrologica Sinica

基　　金：国家自然科学基金青年项目(51805136);中央高校基础研究基金(PA2021KCPY0049)。

摘　　要：线性导轨广泛应用于精密机床和仪器,其运动精度直接影响所在设备的空间定位精度。针对团队前期研制的收发分体式四自由度激光测量系统可以测量导轨直线度、俯仰角和偏摆角,但其直线度与角度测量结果间存在耦合干扰问题,提出了一种误差建模与补偿方法。根据激光测量系统的原理和结构,分析并确定了耦合误差的主要来源,利用矩阵光学及齐次坐标变换的方法建立了耦合误差的补偿模型。以雷尼绍XL-80型激光干涉仪为基准,对所建立的误差补偿模型进行了实验验证,结果表明:利用所建模型补偿后的直线度和角度测量误差均降低了75%以上。所提出的误差建模与补偿方法不但有助于提高四自由度激光测量系统的精度,同时也有助于降低其成本。Linear guide pairs are widely used in precision machine tools and instruments,and their kinematic accuracy directly affects the spatial positioning accuracy of the equipment in which they are located.Aiming at the earlierdeveloped transceiver split-type four-degree-of-freedom laser measurement system that can measure the straightness,pitch and yaw angle of the guide rail,but there is a problem of coupling interference between the straightness and angle measurement results,an error modeling and compensation method is proposed.The principle and structure of the laser measurement system are introduced,the main sources of the coupling error are determined and analyzed,and the compensation model of the coupling error is established by using the method of matrix optics and flush coordinate transformation.The results show that the straightness and angle measurement errors are reduced by more than 75% after the compensation using the proposed model.The proposed error modeling and compensation method not only helps to improve the accuracy of the four-degree-of-freedom laser measurement system,but also helps to reduce its cost.

关 键 词：计量学 几何运动误差 线性导轨 激光测量系统 四自由度 耦合误差建模 

分 类 号：TB92[一般工业技术—计量学]