射频等离子体离子能量分布特性研究  

Studies on the ion energy distribution of radio-frequency discharges

作　　者：邢海龙 金伟[2] 梁传辉[2] 代波[1] 任勇[1] 毛新春[2] 王东平[2] 王小英[2] 陈长安[2] XING Hai-long;JIN Wei;LIANG Chuan-hui;DAI Bo;REN Yong;MAO Xin-chun;WANG Dong-ping;WANG Xiao-ying;CHEN Chan-gan(Southwest University of Science and Technology,Mianyan 621010;Institute of Materials,China Academy of Engineering Physics,Mingyang 621908)

机构地区：[1]西南科技大学,绵阳621010 [2]中国工程物理研究院材料研究所,绵阳621908

出　　处：《核聚变与等离子体物理》2021年第4期598-602,共5页Nuclear Fusion and Plasma Physics

基　　金：国家自然科学基金(11775194);国家磁约束核聚变能发展研究专项(2015GB109001)。

摘　　要：利用质谱仪对不同进气速率下的氩气、氮气及氮-氘混合三种射频感应耦合等离子体的离子能量分布、离子浓度演化进行了研究。实验结果表明,等离子体的离子能量分布呈多峰结构;在功率一定时,纯氩气及氮气离子的峰值能量随进气速率增加向低能端移动,且离子通量密度逐渐降低;而氮-氘混合等离子体生成的氨系离子ND_(4)^(+),峰值离子能量随氘气进气速率先降低后上升,通量密度先增大后降低。Using a diagnostic system with a spectrometer, ion energy distributions and ion concentration evolutions of argon, nitrogen and nitrogen-deuterium plasmas induced by radio frequency were studied at different inlet flow rates. It is found that the plasma ion energy distribution has a multi-energy-peak structure,peak values and ion flux in argon and nitrogen plasmas with fixed discharge power decrease with the increase of gas flow rate. Peak energy of ND;in nitrogen-deuterium plasma initially decreases and then increases while the ion flux increases first and then falls down as the increment of extra supplement of deuterium.

关 键 词：感应耦合等离子体 离子能量分布 进气速率 

分 类 号：O536[理学—等离子体物理] TL65[理学—物理]