基于巨磁阻效应的磁场传感器研究进展  

Research Progress of Magnetic Field Sensors Based on GMR Effect

作　　者：王立乾 胡忠强 关蒙萌 吴金根 仙丹 王琛英[2,3] 毛琦[2,3] 王志广[1] 周子尧 田边[2,3] 蒋庄德[2,3] 刘明[1] WANG Li-qian;HU Zhong-qiang;GUAN Meng-meng;WU Jin-gen;XIAN Dan;WANG Chen-ying;MAO Qi;WANG Zhi-guang;ZHOU Zi-yao;TIAN Bian;JIANG Zhuang-de;LIU Ming(College of Electronic Science and Engineering,Xi’an Jiaotong University,Electronic Materials Research Laboratory,Key Laboratory of the Ministry of Education&International Center for Dielectric Research,Xi’an 710049,China;Collaborative Innovation Center of High-End Manufacturing Equipment,Xi’an Jiaotong University,Xi’an 710049,China;International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology,Xi’an Jiaotong University,Xi’an 710049,China)

机构地区：[1]西安交通大学电子科学与工程学院,电子陶瓷与器件教育部重点实验室与国际电介质研究中心,陕西西安710049 [2]西安交通大学高端制造装备协同创新中心,陕西西安710049 [3]西安交通大学微纳制造与测试技术国际合作联合实验室,陕西西安710049

出　　处：《仪表技术与传感器》2021年第12期1-12,17,共13页Instrument Technique and Sensor

基　　金：国家重点研发计划项目(2018YFB0407601,2018YFF0212301);国家自然科学基金项目(91964109,62071374,51802248);国家111引智计划项目(B14040)。

摘　　要：基于巨磁阻效应的磁传感技术与标准CMOS电路工艺高度兼容,相比传统的霍尔元件、互感线圈及各向异性磁阻等传感器,在灵敏度、功耗、体积和热稳定性等方面具备一定的优势,应用前景十分广阔。该文简要介绍了基于巨磁阻效应的磁场传感器在电流计量、汽车工业、罗盘导航、生物检测及无损探测等领域的最新研究进展,讨论和总结了不同应用场景下各类巨磁阻传感器的工作机理及核心结构,这些研究可以为开发磁敏传感器的新型应用方式提供启示和思路。The magnetic sensing technology based on giant magnetoresistance(GMR)effect is highly compatible with the standard CMOS circuit process.Compared with the traditional Hall element,inductance coil and anisotropic magnetoresistance sen⁃sor,GMR sensor exhibit certain advantages in terms of sensitivity,power consumption,volume and thermal stability,and has broad application prospects.This review introduced the latest progress of GMR sensor in the fields of current measuring,automotive,compass navigation,biological detection and nondestructive detection and so on,discussed and summarized the principle and structure of GMR sensor under different application scenarios,which provided inspiration and ideas for the development of new applications of magnetic sensors.

关 键 词：巨磁阻效应 磁场传感器 智能电网 生物检测 无损检测 交叉应用 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]