不同基体材料筒体内壁磁控溅射膜层工艺研究  

Study on Magnetron Sputtering Film Process on Inner Wall of Cylinder with Different Matrix Materials

作　　者：贺平[1] 张旭[1] 杨洋[1] HE Ping;ZHANG Xu;YANG yang(The Institute of Physical and Chemical Engineering of Nuclear Industry,Tianjin 300180,China)

机构地区：[1]核工业理化工程研究院,天津300180

出　　处：《真空》2021年第6期33-37,共5页Vacuum

摘　　要：筒体是由复合材料和金属柔性件组合而成,筒体不能直接接触工作介质,因此其内壁需要施加一层保护膜。本文通过对不同筒体材料预处理,同时利用磁控溅射工艺进行工艺研究和试制,最终确定了一体镀膜工艺路线,并开发出相应的磁控溅射工艺参数,利用该工艺参数成功在筒体内壁实现一次性成膜,所得膜层完整并具有一定膜基结合强度和膜层厚度。The barrel is made of composite materials and metal flexible components. The cylinder can not directly contact with the working medium, and thus a protective film needs to be deposited onto the inner wall. In this paper, through the screening of different material pretreatment processes of the cylinder, the magnetron sputtering process is used for process research and trial production. Finally, the integrated coating process route is determined and the corresponding process parameters are developed.The process parameters were used to realize one-time coating on the inner wall of the cylinder successfully. The as-prepared film is complete and has a certain binding force and film thickness.

关 键 词：复合材料 磁控溅射 镀膜工艺 结合强度 

分 类 号：O484.5[理学—固体物理] TB43[理学—物理]