高灵敏度柔性电阻式压力传感阵列研究  

Research on highly sensitive flexible resistive pressure sensing array

作　　者：周桓锋 李俊良 冯涵 刘平[1] 刘彩霞[1] 黄英[1] ZHOU Huanfeng;LI Junliang;FENG Han;LIU Ping;LIU Caixia;HUANG Ying(School of Electronic Science and Applied Physics, Hefei University of Technology, Hefei 230601, China)

机构地区：[1]合肥工业大学电子科学与应用物理学院,安徽合肥230601

出　　处：《合肥工业大学学报（自然科学版）》2021年第12期1646-1651,共6页Journal of Hefei University of Technology：Natural Science

基　　金：合肥工业大学学术新人提升计划资助项目(JZ2020HGTB0027)。

摘　　要：由于电阻式传感单元良好的稳定性、数据采集的便捷性以及良好的静态和动态特性,高性能的柔性电阻式电子皮肤受到广泛关注。一般的电阻式传感单元的灵敏度较低,限制了电阻式电子皮肤的应用范围。文章提出了一种基于炭黑/UV胶(CB/UV)层以及具有裂纹的石墨烯片/聚对苯乙烯磺酸钠(GNPs/PSS)层的具有双层协同导电网络结构的柔性电阻式应变敏感单元,该敏感单元具有高应变灵敏度系数GF(最高能达到7449)、低迟滞(4.42%)、响应时间快(80 ms)、稳定性好的特点;设计了具有4×4个传感单元的压力传感阵列,其传感单元具有高灵敏度(最高能达到15.23 kPa^(-1)),将压力传感阵列用于检测砝码质量和抓取力的大小,结果表明其能够清楚地展示出压力的分布和大小。采用该新型柔性电阻式应变敏感单元及其压力传感阵列可拓宽电子皮肤和可穿戴设备的应用范围。Due to the resistive sensing unit having the characteristics of good stability,convenient data collection and the good static and dynamic characteristics,high-performance flexible resistive electronic skins have drawn widespread attention.However,the sensitivity of general resistive sensing units is low,which limits the application range of resistive electronic skins.This paper reports a flexible resistive strain sensitive unit with double-layer cooperative conductive network structure based on a carbon black/UV adhesive(CB/UV)layer and graphene/polystyrene sodium sulfonate(GNPs/PSS)layer having cracks.The sensitive unit has the characteristics of high gauge factor(GF~7499),low hysteresis(4.42%),fast response time(80 ms)and good stability.Based on this,a pressure sensing array with 4×4 sensing units which have high sensitivity(15.23 kPa^(-1))is designed.The pressure sensing array is used to detect the mass of the weight and the grasping force.The results show that it can clearly detect the distribution and magnitude of pressure.This new flexible resistive strain sensitive unit and its pressure sensing array have potential for broadening the application range of electronic skin and wearable devices.

关 键 词：双层协同导电网络 裂纹 高灵敏度 电阻式 压力传感阵列 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]