激励频率对TM-AFM相位成像的影响  

Effect of excitation frequency on TM-AFM phase imaging

作　　者：魏瑞华 彭安杰 宾凤姣 魏征[1] WEI Rui-hua;PENG An-jie;BIN Feng-jiao;WEI Zheng(School of Mechanical and Electrical Engineering,Beijing University of Chemical Technology,Beijing 100029;East China Engineering Science and Technology Co.Ltd.,Hefei Anhui 230041,China)

机构地区：[1]北京化工大学机电工程学院,北京100029 [2]东华工程科技股份有限公司,安徽合肥230041

出　　处：《电子显微学报》2021年第6期665-670,共6页Journal of Chinese Electron Microscopy Society

基　　金：国家自然科学基金资助项目(No.NSFC 11572031)。

摘　　要：相位成像是轻敲模式下原子力显微镜(tapping mode atomic force microscope,TM-AFM)最具有特色的成像方式。本文以获得高质量的相位像为主要研究目的,利用Euler-Bernoulli(欧拉-伯努利)梁方程,将系统动力学模型简化为基于支承运动的弹簧谐振子模型,推导出相位与激励频率之间的关系。实验结果与理论分析一致,这一结论对于寻找TM-AFM操作中最合适的激励频率范围具有重要意义。Phase imaging is the most characteristic imaging mode of the TM-AFM.The main purpose of this paper is to obtain high quality phase images.The Euler-Bernoulli beam equation was used to solve the vibration equation by analyzing the dynamic model of TM-AFM micro-cantilever beam.According to the vibration content,the dynamic model was simplified to the spring harmonic oscillator model based on the bearing motion and the relation between the phase and the excitation frequency was deduced.Experiments were designed according to the relation between phase and frequency obtained from the derivation.The excitation frequency was changed to make it close to the first-order natural frequency until it reached the first-order natural frequency.The results of the experiments are consistent with the theoretical analysis,which is of great significance for finding the most suitable excitation frequency range in TM-AFM operation.

关 键 词：原子力显微镜 轻敲模式 激励频率 相位成像 相位对比度 

分 类 号：O657[理学—分析化学] Q6-3[理学—化学]