材料表面性质对扫描电镜镀膜形貌的影响  

The effects of the nature of the materials surface on the morphology of sputtered coating for SEM sample preparation

作　　者：万鹏[1,2] 王馨楠 徐强[1,2] 李启迅 WAN Peng;WANG Xin-nan;XU Qiang;LI Qi-xun(Instrumental Analysis Center,Dalian University of Technology,Dalian Liaoning 116024;Analysis Center of the School of Chemical Engineering,Dalian University of Technology,Dalian Liaoning 116024;Liaoning Provincial Key Laboratory of Clean Utilization of Chemical Resources,Institute of Chemical Engineering,Dalian University of Technology,Dalian Liaoning 116024,China)

机构地区：[1]大连理工大学分析测试中心,辽宁大连116024 [2]大连理工大学化工学院分析中心,辽宁大连116024 [3]辽宁省化工资源清洁利用重点实验室,化学工程研究所,辽宁大连116024

出　　处：《电子显微学报》2021年第6期758-763,共6页Journal of Chinese Electron Microscopy Society

摘　　要：离子溅射镀膜是常规扫描电镜(SEM)制样前处理手段。本文以硅片和铜片为研究对象,从样品受碳污染情况和表面疏水性两方面研究了样品表面性质对离子溅射镀膜形貌的影响。对比了洁净硅片和铜片以及受碳污染的硅片和铜片在镀膜后的形貌特征,考察了表面疏水化处理前后铜片表面的镀膜形貌以研究样品表面疏水性对镀膜形貌的影响。发现样品表面若存在碳污染或具有较强疏水性都会在镀膜后对样品表面形貌产生假象或干扰,主要表现为镀膜不连续生长导致的花纹样结构。如果将样品表面碳污染层去除或使其重新变得亲水,又可以将镀膜形貌干扰降低到几乎不可见的程度。由此可见,样品表面的洁净程度及亲疏水性是影响镀膜形貌的两个关键因素。Sputter coating is a conventional way to make SEM samples conductive,but the morphology of the coating could affect the SEM images of samples.In this study,the effect of carbonaceous contamination and the hydrophobicity of the sample surface were investigated based on Si wafer and Cu foil.It has been confirmed that compared to clean Si wafer and Cu foil,a layer of carbonaceous contamination could make the sputtered coating visible by showing random patterns of cracks of inconsistent coating.Similar results were shown in the Cu foil samples after the treatment of hydrophobization.But the patterns of cracks could disappear by making the samples hydrophilic again or after the carbonaceous layer was removed.Thus the cleanness of the sample and the hydrophobicity were two important factors that affect the morphology of sputtered coating.

关 键 词：扫描电子显微镜 离子溅射镀膜 镀膜形貌假象 碳污染 表面疏水性 

分 类 号：TG115.215.3[金属学及工艺—物理冶金] TG115.21[金属学及工艺—金属学]