MEMS固体微推力器的发展综述  

Development of MEMS Solid Micro Thruster

作　　者：胡美些[1] Hu Meixie(Inner Mongolia Technical College of Mechanics&Electrics,Hohhot 010070)

机构地区：[1]内蒙古机电职业技术学院,呼和浩特010070

出　　处：《航天制造技术》2021年第6期67-72,78,共7页Aerospace Manufacturing Technology

摘　　要：MEMS固体微推力器因其结构简单、能耗低、可靠性高、体积小等优点,在微、纳卫星上具有很好的应用前景。总结和概述了MEMS固体微推力器的设计方法、结构特点、制造工艺技术,然后分析相关的技术难点和关键技术,并对国内外的研究情况进行了总结对比,最后针对应用需求,提出后续研究的建议。Because of the advantages of simple structure,low energy consumption,high reliability and small size,MEMS solid micro thruster has a good application prospect in Micro and nano-satellites.In this paper,firstly,the design method,structural characteristics and manufacturing technology of MEMS solid micro thruster are summarized,and then the related technical difficulties and key technologies are analyzed and the domestic and international research situation was compared.Finally,according to the application requirements,some suggestions are put forward for the follow-up research.

关 键 词：固体微推力器 微机电系统 微推进系统 

分 类 号：V435[航空宇航科学与技术—航空宇航推进理论与工程]