单电机驱动椭偏双补偿器旋转结构及系统控制  

Rotational structure and system control of ellipsometric double compensator driven by single motor

作　　者：林聪 张瑞[1] 薛鹏[1] 尚琰 刘政杰 徐跃 LIN Cong;ZHANG Rui;XUE Peng;SHANG Yan;LIU Zhengjie;XU Yue(North University of China,Taiyuan 030000,China)

机构地区：[1]中北大学,太原030000

出　　处：《激光杂志》2021年第12期39-43,共5页Laser Journal

基　　金：山西省面上自然基金项目(No.201901D111158);山西省面上青年基金项目(No.201801D221211);山西省创新项目(No.2019L0530)。

摘　　要：针对目前双伺服电机控制补偿器旋转的椭偏测量技术中电机同步旋转控制复杂,且探测器同步信号触发采集困难、长时间运行稳定性差等缺点。提出一种基于单电机驱动的双相位补偿器旋转结构以及控制方法。该结构中与伺服电机连接的同步齿轮的直径比为5∶3,不同的齿轮直径是为实现对双旋转补偿器的差速控制,结合双旋转补偿器椭偏测量理论,实现样品的多维度信息获取;且基于控制理论设计伺服电机驱动电路和信号触发采集电路,完成相关硬件方面设计。最终实现系统在长时间运行过程中补偿器转速稳定可控,一次测量可得穆勒矩阵16个参数,为椭偏测量样品各维度信息提供理论依据及技术支撑。Aiming at the disadvantages of the current ellipsometric measurement technology with dual-servo motors controlling the rotation of the compensator,the motor synchronous rotation control is complicated,the detector synchronization signal is difficult to trigger acquisition,and the long-term operation stability is poor.This paper proposes a dual-phase compensator rotation structure and control method based on a single motor drive.The diameter ratio of the synchronous gear connected with the servo motor in this structure is 5:3.The different gear diameters are used to realize the differential speed control of the dual-rotation compensator,combined with the ellipsometric measurement theory of the dual-rotation compensator,to realize the multi-dimensional sample Information acquisition;and based on the control theory to design the servo motor drive circuit and signal trigger acquisition circuit,complete the related hardware design.Finally,the speed of the compensator is stable and controllable during the long-term operation of the system,and 16 parameters of the Mueller matrix can be obtained in one measurement,which provides theoretical basis and technical support for the ellipsometric measurement of various dimensions of the sample.

关 键 词：椭偏仪 穆勒矩阵 单电机驱动 双旋转补偿器 

分 类 号：TN209[电子电信—物理电子学]