激光调阻机测控系统设计  

Design of Measurement and Control System of Laser Resistor Trimming Machine

作　　者：林秉泉 徐巧玉[1] 徐恺[1] 宋江岩 王军委 LIN Bingquan;XU Qiaoyu;XU Kai;SONG Jiangyan;WANG Junwei(Mechatronics Engineering School,Henan University of Science&Technology,Luoyang 471003,China;Luoyang Bingyan Laser Equipment Co.,Ltd.,Luoyang 471003,China;Luoyang GINGKO Technology Co.,Ltd.,Luoyang 471003,China)

机构地区：[1]河南科技大学机电工程学院,河南洛阳471003 [2]洛阳冰岩激光设备有限公司,河南洛阳471003 [3]洛阳银杏科技有限公司,河南洛阳471003

出　　处：《河南科技大学学报（自然科学版）》2022年第2期21-26,M0003,M0004,共8页Journal of Henan University of Science And Technology:Natural Science

基　　金：国家自然科学基金项目(51205108)。

摘　　要：为了有效提高激光调阻机的调阻精度和调阻效率,本文设计了一种激光调阻机测控系统。通过检测调阻过程中阻值的变化,有效控制激光器动作,实现对目标电阻的刻蚀。采用高级精简指令集微处理器(ARM)作为主控制器,实现与上位机通信、电阻数据采集计算和比较器输出控制。依据开尔文测阻法搭建恒流源电路、信号调理电路和数据采集电路。通过设计可扩展的继电器阵列实现测量通道的快速切换,进而有效保障了激光调阻机的快速调阻。采用硬件电路直接输出晶体管-晶体管逻辑电平(TTL)信号控制激光器动作,实现对目标电阻的刻蚀,保证调阻精度与调阻效率。实验结果表明:电阻的测量精度最高为0.01%,调阻精度最高为0.1%,调阻速度最快为50个/s。In order to effectively improve the resistance adjustment accuracy and efficiency of the laser resistor trimming machine,a measurement and control system of laser resistance trimming machine was designed. By detecting the change of resistance value in the process of resistance adjustment,the laser action was effectively controlled to realize the etching of the resistance. In this scheme,advanced RISC machine( ARM) was used as the main controller to realize communication with the host computer,resistance data acquisition and calculation,and comparator output. The constant current source circuit,signal conditioning circuit and data acquisition circuit were constructed with the Kelvin resistance method. The rapid switching of the measurement channel was realized by designing an extensible relay array,which effectively guaranteed the rapid resistance adjustment of the laser resistor trimming machine. The hardware circuit directly output the TTL signal to control the laser action,so as to realize the etching of the target resistance and ensure the resistance adjustment accuracy and efficiency. The experimental results show that the measurement accuracy of resistance is up to 0. 01%,the adjustment accuracy is up to 0. 1%,and the fastest speed of adjustment is 50/s.

关 键 词：激光调阻机 测控系统 ARM 数据采集 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置] TP274[自动化与计算机技术—控制科学与工程]