高精度快刀伺服系统构建及其特性研究  

Modeling and study on characteristic of high accuracy FTS system

作　　者：张敏[1] 吴祉群[1] 陈东生[1] ZHANG Min;WU Zhiqun;CHEN Dongsheng(Institute of Machinery Manufacturing Technology,China Academy of Engineering Physics,Mianyang 621900,CHN)

机构地区：[1]中国工程物理研究院机械制造工艺研究所,四川绵阳621900

出　　处：《制造技术与机床》2022年第1期84-88,共5页Manufacturing Technology & Machine Tool

基　　金：国家自然科学基金(51905507);四川省国际科技创新合作项目(2020YFH0006)。

摘　　要：快刀伺服是实现自由曲面光学曲面加工的方式之一。文中基于压电陶瓷为致动元件、柔性铰链为传动元件构建了快刀伺服系统。测试结果表明,研制的快刀伺服系统定位精度为4 nm以下,重复定位精度为4 nm以下,最大输出位移达到50 nm,运动频响在位移为20 nm时达到了150 Hz。为后续快刀系统在自由曲面光学零件加工领域应用奠定了基础。Fast tool servo(FTS)is one of mechanical methods used in optical components with complex surfaces.In this paper,a FTS system which is drived by piezoelectric ceramic(PZT)and transferred by flexuer hinges is developed.The testing results show that the positioning errors are less than 4 nm,the repetitive positioning error is less than 4 nm,the max travel is 50 nm and the frequency response precedes 150 Hz at 20μm;A good foundation for future use was built in optical components with complex surfaces.

关 键 词：快刀伺服 压电陶瓷 柔性铰链 

分 类 号：TH133.35[机械工程—机械制造及自动化]