一种推挽式拉链腔型声光子晶体加速度计  

A push-pull zipper cavity optomechanic crystal accelerometer

作　　者：刘红硕 毕然[1] 傅力 佘玄[1] 陈侃[1] 舒晓武[1] LIU Hongshuo;BI Ran;FU Li;SHE Xuan;CHEN Kan;SHU Xiaowu(College of Optical Science and Engineering,Zhejiang University,Hangzhou 310027,China;Accelink Technology Co.Ltd,Wuhan 430205,China)

机构地区：[1]浙江大学光电科学与工程学院,杭州310027 [2]光迅科技股份有限公司,武汉430205

出　　处：《中国惯性技术学报》2021年第5期667-671,679,共6页Journal of Chinese Inertial Technology

基　　金：浙江省自然科学基金资助(Q18F050002)。

摘　　要：针对小型化惯性测量单元对加速度计的集成需求,设计了一种基于腔光力学原理的推挽式拉链腔型声光子晶体加速度计。加速度计采用铌酸锂单晶薄膜材料,将MMI耦合器、相位调制器、声光子晶体拉链腔等结构实现单片集成,同时推挽结构消除了旁轴加速度带来的误差。所提出的加速度计基于仿真结果功能特性如下:带宽大于20 kHz,噪声等效加速度10.2μg/√Hz,通过增大测试质量至10^(-9) kg可以将分辨率提升至10^(-7) g/√Hz量级,采用闭环调频反馈,可扩展线性测量范围至±80 g。同时实现大带宽、高分辨率与大量程的加速度计传感。加速度计适配激光光源,未来可与谐振式光学陀螺集成应用于惯性导航系统。In order to meet the requirement of accelerometer integration in miniaturized inertial measurement unit,a push-pull zipper cavity optomechanical crystal accelerometer based on cavity optomechanic is designed.The accelerometeris formed in the device layer of Lithium niobate-on-insulator(LNOI),which integrates MMI coupler,phase modulator and optomechanical crystal zipper cavity monolithically.At the same time,the push-pull structure eliminates the error caused by paraxial acceleration.Based on the simulation results,the characteristics of the proposed accelerometer are as follows:the bandwidth is greater than 20 kHz,the noise equivalent acceleration(NEA)is 10.2μg/√Hz,and the resolution can be improved to the order of 10^(-7) g/√Hz by increasing the test mass to 10^(-9) kg.By using closed-loop frequency modulation feedback,the linear measurement range can be extended to±80 g.The accelerometer achieves large bandwidth,high resolution and large range at the same time,which adapts to the laser source and can be integrated with resonant optical gyroscope in inertial navigation system in the future.

关 键 词：微光机电系统 加速度计 声光晶体 拉链腔 推挽式 

分 类 号：U666.1[交通运输工程—船舶及航道工程]