Evanohm合金的双环线型微加热器特性研究  

Study on characteristics of Evanohm alloy micro-heater with double-loop structure

作　　者：仲逸飞 刘景全[1] ZHONG Yifei;LIU Jingquan(National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Key Laboratory for Thin Film and Microfabrication of Ministry of Education,Institute of Micro/Nano Science and Technology,Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区：[1]上海交通大学微纳科学技术研究院微米/纳米加工技术国家重点实验室薄膜与微细技术教育部重点实验室,上海200240

出　　处：《传感器与微系统》2022年第1期7-9,14,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(61728402)。

摘　　要：以Evanohm合金为材料,设计了一种双环线型微加热器。使用AC磁控溅射技术在硅基底上沉积合金薄膜,并采用微机电系统(MEMS)微加工工艺实现薄膜图形化,以此作为加热器的加热元件。在常温下,研究了所制备的薄膜加热器件的加热性能与电学特性,并在深低温下进一步测试了其电学性能。研究结果表明:此种微型加热器电阻值稳定。在[5,300]K的温度区间内,加热器的电阻值变化不超过2%;在40 K的温度,电阻值达到Kondo最小值;在[35,55]K的温度区间,温度系数降至8.9×10^(-6) K^(-1)。器件可在较宽低温区保持良好的电阻值稳定性,具有在低温环境中应用的潜力。Using Evanohm alloy as the material,a loop structure micro-heater is designed.AC magnetron sputtering technology is used as the basic thin film deposition method to deposit the alloy on the silicon substrate,and MEMS micro-machining process is used to achieve thin film patterning to form the heating element of the heater.At room temperature,the heating performance and electrical characteristics of the prepared thin film heating device are studied,and the electrical performance is further tested at deep low temperature.The research results show that this type of micro-heater has stable resistance.In temperature range of 5~300 K,the resistance changes of the heater within 2%,and at 40 K,the resistance reaches the Kondo minimum.In the temperature range of[35,55]K,the temperature coefficient drops to8.9×10^(-6) K^(-1).The device can maintain good resistance value stability in a wide low temperature region,and has the potential for application in low temperature environments.

关 键 词：微型加热器 微机电系统 Evanohm合金 低温 

分 类 号：TN42[电子电信—微电子学与固体电子学] TP212[自动化与计算机技术—检测技术与自动化装置]