三维力传感器的设计和静态解耦算法研究  

Design of Three-Dimensional Force Sensor and Research on the Static Decoupling Algorithm

作　　者：彭小武 马国鹭[1] 赵涌 宋子军 王清清[1] PENG Xiaowu;MA Guolu;ZHAO Yong;SONG Zijun;WANG Qingqing(Southwest University of Science and Technology,Key Laboratory of Manufacturing Process Testing Technology,Ministry of Education,Mianyang Sichuan 621000)

机构地区：[1]西南科技大学制造过程测试技术教育部重点实验室,四川绵阳621010 [2]中国航发四川燃气涡轮研究院,四川绵阳621010 [3]航空发动机高空模拟技术重点实验室,四川绵阳621010

出　　处：《传感技术学报》2021年第11期1518-1522,共5页Chinese Journal of Sensors and Actuators

基　　金：航空发动机尾喷流中颗粒物参数检测关键技术研究项目(20zh0074)。

摘　　要：针对三维力传感器在获取大量程空间三维力时存在精度低、维间耦合的问题,从机械解耦角度进行改进,弹性体采用十字梁型结构,竖梁两侧开设通槽,并将电阻应变片粘贴于竖梁和横梁两侧,通过电阻应变片组桥方式连接。利用万能试验机对传感器进行标定加载分析,基于最小二乘理论对经多次测量筛选出的数据进行拟合,得出该传感器输入载荷与输出电压之间解耦矩阵。采用研制出的三维力传感器进行论证实验,通过对传感器标定并结合弹性体本身机械结构解耦。实验结果表明,所研制的大量程三维力传感器的Ⅰ类误差和Ⅱ类误差分别为2.36%和2.1%,能够较好地抑制各维间的耦合,并达到了该传感器的预期精度要求。For low precision and inter-dimensional coupling in obtaining a large range three-dimensional force sensor,it can be improved by the modification of elastomer from the perspective of mechanical decoupling.The elastomer adopts a cross-beam structure,with grooves are opened on both sides of the vertical beam and the resistance strain gauges pasted on the both sides of the cross beam,connecting through group bridging of resistance strain gauges.Based on the calibration load analysis of the sensor with a universal tester,by fitting data through multiple measurements under the guidance of least squares theory,the decoupling matrix between the input load and output voltage of the sensor can be made.Through calibration of the sensor,together with mechanical decoupling of the elastomer,the experiment of the three-dimensional force sensor is to be carried out.The results show that the type I and type II errors of the large range three-dimensional force sensor are 2.36%and 2.1%respectively,which can better control inter-dimensional coupling and the expected precision of the sensor can be guaranteed.

关 键 词：三维力传感器 静态标定 最小二乘理论 结构解耦 维间耦合 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]