铜构件磁控溅射多层膜及其耐蚀性  

Magnetron sputtering of multilayer film on copper part and its corrosion resistance

作　　者：温佳源 宋贵宏[1] 赵鑫 贺春林[2] WEN Jiayuan;SONG Guihong;ZHAO Xin;HE Chunlin(School of Material Science and Technology,Shenyang University of Technology,Shenyang 110870,China;Liaoning Province Key Laboratory of Advanced Materials,Shenyang University,Shenyang 110044,China)

机构地区：[1]沈阳工业大学材料科学与工程学院,辽宁沈阳110870 [2]沈阳大学辽宁省先进材料重点实验室,辽宁沈阳110044

出　　处：《电镀与涂饰》2022年第1期18-22,共5页Electroplating & Finishing

基　　金：国家自然科学基金(51772193)。

摘　　要：先在铜基体上电镀Ni层,接着溅射沉积Ni-Cr和Ni-Cr-Al-Si合金薄膜。对比了Ni层、Ni/Ni-Cr复合膜层和Ni/Ni-Cr/Ni-Cr-Al-Si复合膜层的相结构、微观形貌和耐蚀性。结果表明,Ni电镀层表面光滑,Ni/Ni-Cr复合膜层和Ni/Ni-Cr/Ni-Cr-Al-Si复合膜层表面都由致密、连续的团簇颗粒组成。铜基体与Ni电镀层之间、Ni电镀层与溅射沉积薄膜之间都紧密结合。3种试样在海水中的腐蚀机制相同,Ni/Ni-Cr/Ni-Cr-Al-Si复合膜层的耐蚀性最佳。A Ni coating was firstly electroplated on copper substrate,and then a Ni-Cr alloy and a Ni-Cr-Al-Si alloy thin films were deposited on it by magnetron sputtering.The phase structure,micromorphology,and corrosion resistance of Ni coating,Ni/Ni-Cr composite film,and Ni/Ni-Cr/Ni-Cr-Al-Si composite film were compared.The results showed that the electroplated Ni coating was smooth,while the Ni/Ni-Cr and Ni/Ni-Cr/Ni-Cr-Al-Si composite film were composed of compact and continuous clusters.The electroplated Ni coating bonded firmly to both copper substrate and the magnetron-sputtered thin film.The three kinds of samples have the same corrosion mechanism,while the Ni/Ni-Cr/Ni-Cr-Al-Si composite film has the best corrosion resistance.

关 键 词：铜 电沉积 磁控溅射 镍−铬合金 镍−铬−铝−硅合金 多层膜 微观结构 耐蚀性 

分 类 号：TQ150.6[化学工程—电化学工业]