三质量块MEMS三轴电容式加速度计的设计  

Design of three mass block mems triaxial cap-acitive accelerometer

作　　者：李开富 蒋婷 郭小伟[2] 李绍荣[2] 章龙管 张兴 牟松 Li Kaifu;Jiang Ting;Guo Xiaowei;Li Shaorong;Zhang Longguan;Zhang Xing;Mu Song(Company Profile of China Railway Engineering Services Co.,Ltd.,Chengdu 610000,China;University of Electronic Science and Technology of China,Chengdu 610000,China)

机构地区：[1]中铁工程服务有限公司,成都610000 [2]电子科技大学,成都610000

出　　处：《电子测量与仪器学报》2021年第10期193-201,共9页Journal of Electronic Measurement and Instrumentation

摘　　要：为解决电容式加速度计灵敏度低,交叉灵敏度高等性能问题,设计了一种新的三质量块MEMS三轴电容式加速度计,该三质量块加速度计能够测量x、y、z三个正交轴的外加加速度,单独的横向(x、y轴)和垂直轴(z轴)加速度计集成在同一SOI晶片上,并键合在玻璃基板上,实现了低交叉灵敏度和高机械灵敏度。分析并建立加速度计结构的数学模型,并通过COMSOL仿真分析,优化获得了加速度计的结构和尺寸,设计出的该三质量块加速度计的垂直轴方向的位移灵敏度为1.53669μm/g,水平轴方向的位移灵敏度为6.78μm/g,交叉灵敏度均小于1%。To solve the capacitive accelerometer sensitivity low,cross sensitivity higher performance problems,we design a new quality of three pieces of three axis MEMS capacitive accelerometer,the quality of three piece of accelerometer to measure the X,Y,Z three orthogonal axes and acceleration,separate horizontal(X,Y axis)and vertical axis(Z axis)accelerometer integrated on the same SOI wafer,Low cross sensitivity and high displacement sensitivity are achieved by parallel bonding on the glass substrate.The mathematical model of the accelerometer structure was analyzed and established,and the structure and size of the accelerometer were optimized through COMSOL simulation analysis.The displacement sensitivity of the three mass blocks accelerometer in the vertical axis direction was 1.53669 μm/g,and the displacement sensitivity in the horizontal axis was 6.78 μm/g,and the cross sensitivity was all less than 1%.

关 键 词：三质量块 三轴电容式加速度计 高机械灵敏度 低交叉灵敏度 SOI 

分 类 号：TN03[电子电信—物理电子学] TH703[机械工程—仪器科学与技术]