一种对在片测量系统中串扰误差进行修正的新型校准方法  

A Novel Calibration Method at On-Wafer Measurement System Affected by Leakage

作　　者：王一帮[1] 吴爱华[1] 刘晨[1] 梁法国[1] 栾鹏[1] 霍晔 孙静[1] 赵伟[2] WANG Yi-bang;WU Ai-hua;LIU Chen;LIANG Fa-guo;LUAN Peng;HUO Ye;SUN Jing;ZHAO Wei(The 13th Research Institute of China Electronics Technology Group Corporation,Shijiazhuang,Hebei 050051,China;Xidian University,Xi'an,Shaanxi 710071,China)

机构地区：[1]中国电子科技集团公司第十三研究所,河北石家庄050051 [2]西安电子科技大学,陕西西安710071

出　　处：《计量学报》2021年第12期1553-1558,共6页Acta Metrologica Sinica

基　　金：国家重点研发计划重大科学仪器设备开发专项(2016YFF0102105)。

摘　　要：现有高频段在片S参数校准方法有16-term误差模型校准方法和基于多线TRL的二次串扰修正算法,它们对测试系统之间的串扰误差进行了较好的表征。提出了一种新型校准方法,即把测试系统之间的串扰等效为一个与被测件并联的二端口网络。整个校准方法一共分为两步,第一步采用常规的SOLR校准方法得到基本8项误差模型,第二步通过测量一个串扰标准件(可以是SOLR中的开路校准件)完成对串扰误差的表征。仿真和测试结果表明,新型校准方法准确度可达到16-term误差模型的准确度,并对串扰误差具有相当的抑制效果。同时,新模型方法只需使用4个校准件,数量少于传统16-term误差模型方法,在保证准确度的前提下,提高了测试效率。The conventional calibration method for high frequency on-wafer scattering parameters comprises 16-term error model and two-tier crosstalk correction method based on Multiline TRL,both of which did well at charactering the leakage in measurement system.A novel method is proposed here,taking the leakage in measurement system as a parallel two-port network with the device under test(DUT).The method is divided into two parts.Firstly apply the SOLR calibration method to obtain the eight-term basic error box,then measure a crosstalk standard(could be an open standard in SOLR)to deduce the crosstalk error box.Simulation and measurement results show that,the accuracy of the novel method is comparative to the 16-term method with four less calibration kits,and has a positive response at the crosstalk,and also the novel method improved test efficiency.

关 键 词：计量学 在片S参数 16项误差模型 串扰 SOLR 

分 类 号：TB973[一般工业技术—计量学]