高温电涡流传感器感应探头的优化设计  

Optimal Design of Induction Probe of High Temperature Eddy Current Sensor

作　　者：崔得位 刘冲[1] 翟敬宇[1] 丁来钱 李经民[1] CUI De-wei;LIU Chong;ZHAI Jing-yu;DING Lai-qian;LI Jing-min(College of Mechanical Engineering,Dalian University of Technology,Dalian 116024,China)

机构地区：[1]大连理工大学机械工程学院,辽宁大连116024

出　　处：《仪表技术与传感器》2022年第1期24-29,共6页Instrument Technique and Sensor

摘　　要：为解决电涡流传感器探头在高温(600℃)环境中测量失效的问题,设计了一种感应探头结构,主要由低温共烧陶瓷基底和Ag线圈组成。首先分析涡流检测的原理和普通探头在高温下失效的原因,根据要求选择低温共烧陶瓷作为基底材料,为在一定区域内提高电感值将线圈设计为多层立体螺旋结构。通过电磁仿真和机械-热仿真确定线圈的形状、材料等,结合MATLAB遗传算法优化线圈线径、间距、匝数等参数。然后根据线圈设计参数,通过打孔、填孔、丝网印刷和层压烧结等工艺制作感应探头结构。最后测量线圈的几何参数和电磁特性,实验显示线圈线径的误差小于5%,自谐振频率达到1.8 MHz,工作频率下的空载品质因数大于30,具有较高的线性测量范围和灵敏度。In order to solve the problem of measurement failure of the eddy current sensor probe in high temperature(600℃)environment,an induction probe structure was designed,which was mainly composed of a low-temperature co-fired ceramic substrate and an Ag coil.First,the principle of eddy current testing and the reasons for the failure of ordinary probes were analyzed at high temperature.According to the requirements,low-temperature co-fired ceramics were selected as the base material,and the coil was designed as a multilayer three-dimensional spiral structure in order to increase the inductance value in a certain area.The shape and material of the coil were determined through electromagnetic simulation and mechanical-thermal simulation,and parameters such as coil diameter,spacing,number of turns and so on were optimized in combination with MATLAB genetic algorithm.Then,according to the design parameters of the coil,the induction probe structure was fabricated through processes such as punching,filling,screen printing,and laminating sintering.Finally,the geometric parameters and electromagnetic characteristics of the coil were measured.Experiments show that the error of the coil diameter is less than 5%,the self-resonant frequency reaches 1.8 MHz,and the no-load quality factor at the operating frequency is greater than 30,which has a high linear measurement range and sensitivity.

关 键 词：高温电涡流传感器 感应线圈 有限元仿真 遗传算法 低温共烧陶瓷 灵敏度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]