TiAlN基涂层厚度对微型钻头刚度及孔位精度的影响  

Effect of TiAlN-based Coating Thickness on the Stiffness and Holes Position Accuracy of Micro Drills

作　　者：胡健 孙玉双 陈成 付连宇 屈建国 Hu Jian;Sun Yushuang;Chen Cheng;Fu Lianyu;Qu Jianguo(Shenzhen Jinzhou Precision Technology Co.,Ltd.,Shenzhen Guangdong 518000,China;Engineering Technology Research Center of Precision Micro Drill for High-end PCB of Guangdong Province,Shenzhen Guangdong 518000,China)

机构地区：[1]深圳市金洲精工科技股份有限公司,广东深圳518000 [2]广东省高端印制板用精密微型钻头工程技术研究中心,广东深圳518000

出　　处：《硬质合金》2021年第6期424-433,共10页Cemented Carbides

基　　金：中国五矿集团有限公司科技专项计划项目《PCB微钻用高均匀性硬质合金棒材制备技术》。

摘　　要：利用多弧离子镀技术在3种常用尺寸的微型钻头和棒料表面制备了不同厚度的TiAlN基涂层。通过控制涂层沉积时间,得到涂层厚度为2.1±0.3~8.6±0.3μm。研究了涂层厚度对微型钻头和棒料的刚度以及孔位精度的影响。结果表明:制备的不同厚度涂层结合力均达到最优等级HF1-HF2。经过压弯测试,3种尺寸的微型钻头和棒料的压弯变形量随着涂层厚度的增加逐渐减小,对应的刚度逐渐增加。在φ0.15~3.0 mm微型钻头表面制备厚度~6.37μm的涂层,涂层微型钻头刚度比未涂层时增加了25.7%;尺寸为φ0.20~4.5mm、φ0.25~5.5mm的微型钻头表面涂层厚度增加到8.6±0.3μm时,刚度分别增加了23.1%和15.6%。经过钻孔测试,涂层微型钻头的孔位精度Cpk值高于未涂层微型钻头。将涂层微型钻头磨尖处理,孔位精度进一步提升。TiAlN-based coatings are prepared on the three commonly used micro drills and rods with different sizes by multi-arc ion plating.The coatings with different thickness ranging from 2.1±0.3μm to 8.6±0.3μm are fabricated by adjusting the deposition time.The effects of coating thickness on the stiffness of micro drills and rods and the holes position accuracy by micro drills are studied.The results show that the best adhesion level of HF1-HF2 for coatings with different thickness is obtained.The bending test revealsthat the bending deviation of three sizes of micro drills and rods decreases gradually with the increase of coating thickness,and the corresponding stiffness increases gradually.As the coating thickness on the micro drills ofφ0.15~3.0 mm increases to 6.37μm,the stiffness is 25.7%higher than that of uncoated ones.Similarly,the stiffness increases by 23.1%and 15.6%,respectively,with the increase of the coating thickness to 8.6±0.3μm on the micro drills ofφ0.20~4.5 mm andφ0.25~5.5 mm.The drilling test shows that the holes position accuracy of Cpk value by the coated micro drills is higher than that of uncoated micro drills.The holes position accuracy can be further improved by grinding the bits of the micro drills.

关 键 词：微型钻头 TiAlN基涂层 涂层厚度 刚度 孔位精度 

分 类 号：TG174.4[金属学及工艺—金属表面处理]