多层SAW器件叉指换能器错层布局研究  

Research on split-level layout of interdigital transducers for multilayer SAW devices

作　　者：李志鹏[1] 孟旭 王博男 张超 LI Zhipeng;MENG Xu;WANG Bonan;ZHANG Chao(Transportation College,Northeast Forestry University,Harbin 150040,China)

机构地区：[1]东北林业大学交通学院,黑龙江哈尔滨150040

出　　处：《传感器与微系统》2022年第2期14-16,20,共4页Transducer and Microsystem Technologies

基　　金：中央高校基本科研业务费专项资金资助项目(2572019CP04,2572018AB29)。

摘　　要：利用COMSOL软件建立了采用平层叉指换能器(IDT)布局及错层IDT布局的两种多层声表面波(SAW)器件模型,通过有限元法分别计算了两种模型在不同的薄膜层厚度、电极间距条件下的特征频率、机电耦合系数以及导纳比,并将这些结果进行了对比分析。结果表明:采用错层IDT布局的多层SAW器件在保证器件性能的条件下,结构尺寸可以缩小一倍,同时也降低了继续提高多层SAW器件特征频率的难度。Two kinds of multilayer surface acoustic wave(SAW)device models with flat-layer interdigital transducer(IDT)layout and split-layer IDT layout are established by COMSOL software.The characteristic frequencies,electromechanical coupling coefficients and admittance ratio of the two models under different film thickness and electrode spacing are calculated by finite element method,and these results are compared and analyzed.The simulation results show that the multilayer SAW device with a split-layer IDT layout can reduce the structure size by one time in condition of ensuring the device performance,at the same time,it also reduces the difficulty of continuing to improve the characteristic frequency of the multilayer SAW device.

关 键 词：声表面波 多层结构 叉指换能器 错层布局 

分 类 号：TH89[机械工程—仪器科学与技术] TN65[机械工程—精密仪器及机械]