一体化仿生结构压电MEMS水声传感器  

Piezoelectric MEMS Underwater Acoustic Sensor with Integrated Bionic Structure

作　　者：石树正 耿文平[1] 毕开西 李芬 丑修建[1] Shi Shuzheng;Geng Wenping;Bi Kaixi;Li Fen;Chou Xiujian(Science and Technology on Electronic Test and Measurement Laboratory,North University of China,Taiyuan 030051,China;School of Mechanical Engineering,Hebei University of Architecture,Zhangjiakou 075000,China)

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]河北建筑工程学院机械工程学院,河北张家口075000

出　　处：《微纳电子技术》2022年第1期50-57,共8页Micronanoelectronic Technology

基　　金：国家重点研发计划资助项目(2019YFF0301802);国家自然科学基金资助项目(51975541);山西省重点研发项目(20201101015);2019年度河北省自然科学基金资助项目(F2019404029);河北省“三三三人才工程”资助项目(A202101021)。

摘　　要：为了实现水声传感器的低能耗、高灵敏度以及低成本批量制造,设计并制备了一种四螺旋梁集成拾振微球的一体化仿生压电微电子机械系统(MEMS)水声传感器。根据水母耳石触觉结构和水母身体回弹发电原理对该传感器进行仿生结构设计,并通过建模仿真确定其几何尺寸。利用溶胶-凝胶法制备了PbZr_(0.52)Ti_(0.48)O_(3)(PZT)压电薄膜,实现了压电层与Si晶圆片的异质集成,使用MEMS工艺制造了传感器件并完成封装。通过水声校准系统进行接收灵敏度测试,结果表明水声传感器的灵敏度达到-184.63 dB,表现出良好的灵敏度特性。对促进无源水声传感系统的发展和解决深海环境中微弱信号的灵敏识别、探测等技术难题具有重要意义。To realize the low energy consumption,high sensitivity and low cost mass manufactu-ring of the underwater acoustic sensor,an integrated bionic piezoelectric micro-electromechanical system(MEMS)underwater acoustic sensor with four helical beams and integrated vibration picking microsphere was designed and prepared.According to the tactile structure of jellyfish otolith and the springback power generation principle of jellyfish body,the bionic structure of the sensor was designed,and its geometric size was determined by modeling and simulation.PbZr_(0.52)Ti_(0.48)O_(3)(PZT)piezoelectric thin film was prepared by sol-gel method,and the heterogeneous integration of the piezoelectric layer and the Si wafer was realized.The sensor was fabricated by MEMS process and was packaged.The receiving sensitivity test was carried out by underwater acoustic calibration system.The results show that the sensitivity of the underwater acoustic sensor is up to-184.63 dB,showing good sensitivity characteristics.It is of great significance to promote the development of passive underwater acoustic sensing system and to solve the sensitive recognition,detection and other technical problems of weak signals in the deep sea environment.

关 键 词：微电子机械系统(MEMS) 水声传感器 仿生结构 压电效应 异质集成 

分 类 号：TB565.1[交通运输工程—水声工程]