H型梁谐振式MEMS压力传感器设计  

Design of H-type beam resonant MEMS pressure sensor

作　　者：黄崇勇 许高斌[1,2] 陈兴 马渊明[1,2] HUANG Chongyong;XU Gaobin;CHEN Xing;MA Yuanming(School of Electronic Science and Applied Physics, Hefei University of Technology, Hefei 230601, China;Micro Electromechanical System Research Center of Engineering and Technology of Anhui Province, Hefei 230601, China)

机构地区：[1]合肥工业大学电子科学与应用物理学院,安徽合肥230601 [2]安徽省MEMS工程技术研究中心,安徽合肥230601

出　　处：《合肥工业大学学报（自然科学版）》2022年第2期213-218,共6页Journal of Hefei University of Technology：Natural Science

基　　金：安徽省重点研发计划资助项目(1804a09020018);装备预研/教育部联合基金资助项目(6141A02022422);安徽高校协同创新资助项目(PA2019AGXC0128)。

摘　　要：谐振式微电子机械系统(micro-electro-mechanical system,MEMS)压力传感器因其灵敏度高、体积小等特点近年来被广泛研究。根据谐振梁在不同压力作用下发生振动时,轴向应力的改变引起谐振梁等效刚度变化,从而进一步改变谐振梁谐振频率的原理,文章提出一种采用电磁激励/电磁拾振方式测量外界压力的谐振式压力传感器,并对传感器建立模型,利用ANSYS有限元仿真软件对传感器进行模拟分析与仿真验证。结果表明,量程为0~300 kPa、最大过载1.2倍满量程(full-scale,FS)时,初始频率为57.984 kHz,传感器灵敏度达66.98 Hz/kPa,非线性误差小于0.15%FS。Micro-electro-mechanical system(MEMS)resonant pressure sensors have been widely studied in recent years due to their high sensitivity and small size.When the resonance beam vibrates under different pressures,the change of the axial stress will cause the equivalent stiffness of the resonance beam to change the resonance frequency of the resonance beam.According to this principle,a kind of resonant pressure sensor is proposed,which uses the electromagnetic excitation/electromagnetic detection to measure the external pressure.Based on the model established for the sensor,the ANSYS finite element simulation software is used to perform simulation analysis and simulation verification on the sensor.The results show that in the range of 0-300 kPa,the highest over-pressure is 1.2 FS,the intrinsic frequency is 57.98 kHz,the sensor sensitivity is up to 66.98 Hz/kPa,and the nonlinear error is less than 0.15%FS.

关 键 词：微电子机械系统(MEMS) 谐振式压力传感器 电磁激励 频率测量 H型双端固支梁 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置] TM930.3[自动化与计算机技术—控制科学与工程]