在片LRRM校准算法研究  

Research for On-Wafer LRRM Calibration Algorithm

作　　者：霍晔 梁法国[1] 吴爱华[1] 王一帮[1] 栾鹏[1] 刘晨[1] 孙静[1] HUO Ye;LIANG Fa-guo;WU Ai-hua;WANG Yi-bang;LUAN Peng;LIU Chen;SUN Jing(The 13 th Research Institute of China Electronics Technology Group Corporation,Shijiazhuang,Hebei 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所,河北石家庄050051

出　　处：《计量学报》2022年第1期97-101,共5页Acta Metrologica Sinica

基　　金：国家重点仪器研发专项(2017YFF0106706);国家国防科技工业局技术基础(JSJL2019210B005)。

摘　　要：研究了LRRM(传输线-反射-反射-匹配负载)校准算法,完善了负载标准测量模型,通过参考面平移将测量结果由被测件中间平移到探针端面,基于MATLAB开发平台编制了校准软件。用研究的校准方法和商用校准方法分别对同一在片散射参数测量系统进行校准,校准后的系统测量相同的短路标准和衰减器。测量结果显示,在100 MHz~110 GHz频段范围内,反射幅度最大偏差0.02,反射相位最大偏差0.3°,传输幅度最大偏差0.05 dB,传输相位最大偏差0.5°,能够满足国内在片散射参数校准和测量需求。The LRRM calibration algorithm is researched,the measurement model of load standard is improved,the measured result is translated from the middle of the DUT to the probe tip by reference surface translation,and the calibration software is compiled based on MATLAB.The on-wafer scattering parameter measurement system is calibrated by the researched calibration method and commercial calibration method,and the same short calibration standard and attenuator are measured.The results show that at the frequency of 110 MHz~110 GHz,the maximum deviation of reflection magnitude is 0.02,and the maximum deviation of reflection phase is 0.3 degree,the maximum deviation of the transmission magnitude is 0.05 dB,and the maximum deviation of transmission phase is 0.5 degree,which can meet the demand of on-wafer scattering parameter calibration and measurement.

关 键 词：计量学 在片散射参数 LRRM校准算法 测量模型 校准软件 

分 类 号：TB973[一般工业技术—计量学]