立体光栅测角传感器系统研究  

Research on Stereo Grating Angle Sensor System

作　　者：张文颖 朱浩然 李楠 Zhang Wenying;Zhu Haoran;Li Nan(Institute for Interdisciplinary Quantum Information Technology,Jilin Engineering Normal University,Changchun,Jilin 130052,China;Jilin Engineering Laboratory for Quantum Information Technology,Changchun,Jilin 130052,China;School of Electronics and Information Engineering,Changchun University of Science and Technology,Changchun,Jilin 130022,China)

机构地区：[1]吉林工程技术师范学院量子信息技术交叉学科研究院,吉林长春130052 [2]吉林省量子信息技术工程实验室,吉林长春130052 [3]长春理工大学电子信息工程学院,吉林长春130022

出　　处：《激光与光电子学进展》2021年第23期135-140,共6页Laser & Optoelectronics Progress

基　　金：吉林省教育厅项目(JJKH20200177KJ);2020年吉林省预算内基本建设资金项目(2020C018-4);2018年度博士科研启动经费项目(BSKJ201827)。

摘　　要：为了解决测角传感器精度和径向尺寸之间难以调和的矛盾,从辐通量和莫尔条纹的角度,详细推导和分析了端面光栅轴系误差和柱面光栅轴系误差,并建立了误差模型。基于轴系误差分析,设计了一款结合端面光栅和柱面光栅的立体光栅测角传感器,并搭建了立体光栅测角传感器实验系统。实验结果表明,当读数头呈均匀分布时,立体光栅测角传感器的误差为6.75";当读数头呈非均匀分布时,立体光栅测角传感器的误差为4.33"。研究结果为轴系误差的抑制提供了新方法,为小型化、高精度测角传感器的研制提供了参考。In order to solve the contradiction between accuracy and radial dimension of an angle sensor,this paper derives and analyzes the axial errors of an end grating and a cylindrical grating from the aspects of radial flux and Moire fringes in detail,and the error model is also established.Based on the axial error analysis,a stereo grating angle sensor combining an end grating with a cylindrical grating is designed and the corresponding experimental system of stereo grating angle sensor is established.The experimental results show that the error of the proposed stereo grating angle sensor is 6.75 " when reading head presents a uniform distribution.In contrast,when reading head presents a non-uniform distribution,the error is 4.33".These results provide a new method for the suppression of axial errors and some references for the development of compact and high precision angle sensors.

关 键 词：测量 测角传感器 轴系误差 角度测量 误差分析 圆光栅 

分 类 号：P204[天文地球—测绘科学与技术]