基于MEMS的V型梁结构设计和性能测试  

Design and Performance Test of V-beam Structure Based on MEMS

作　　者：陈林林[1] 李伟[1] 张玉华[1] CHEN Lin-lin;LI Wei;ZHANG Yu-hua(School of Mechanical Engineering,Zhengzhou University of Science and Technology,Zhengzhou 450064,China)

机构地区：[1]郑州科技学院机械工程学院,河南郑州450064

出　　处：《仪表技术与传感器》2022年第2期7-10,51,共5页Instrument Technique and Sensor

基　　金：河南省高等学校重点科研项目计划(22A460031);2020年度河南省教育厅高校重点研究项目(20B460016)。

摘　　要：为了研究不同弯曲曲率对V型梁结构具有不同的影响,提出了以LCP柔性材料为衬底的V型梁弯曲的力学模型,并通过软件仿真和实验验证了弯曲曲率对柔性V型梁器件的影响。从对比结果可得,当柔性衬底的曲率从0逐渐增大到33.3 m^(-1)时,V型梁的驱动电流也随之增大,实测值与仿真值的最大误差低于6.0%,很好地揭示了柔性衬底弯曲曲率对V型梁结构的驱动性能产生的影响。In order to study the effect of different curvature on V-beam structure,a mechanical model of V-beam bending based on LCP flexible material was proposed,and the influence of curvature on flexible V-beam device was verified by software simulation and experiment.The results show that when the curvature of the flexible substrate increases from 0 to 33.3 m^(-1),the driving current of the V-beam increases,and the maximum error between the measured value and the simulation value is less than 6.0%,which well reveals the influence of the curvature of the flexible substrate on the driving performance of the V-beam structure.

关 键 词：MEMS 弯曲曲率 柔性衬底 V型梁结构 力学特性 

分 类 号：TP211.4[自动化与计算机技术—检测技术与自动化装置]