压电驱动器的电致振动特性研究  

Study on Vibration Characteristics of a Piezoelectric Actuator Under Voltage Excitation

作　　者：方孟翔 刘文光[1] 冯逸亭 陈红霞 吴兴意 胡剑波 FANG Mengxiang;LIU Wenguang;FENG Yiting;CHEN Hongxia;WU Xingyi;HU Jianbo(School of Aeronautical Manufacturing Engineering,Nanchang Hangkong University,Nanchang Jiangxi 330063,China)

机构地区：[1]南昌航空大学航空制造工程学院,江西南昌330063

出　　处：《传感技术学报》2021年第12期1584-1590,共7页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(51965042)。

摘　　要：旨在分析压电驱动器的电激励振动特性。以双晶压电悬臂梁为对象,基于能量法和热力学平衡方程推导了压电悬臂梁在电压激励下的强迫振动微分方程。利用自行搭建的电激励振动试验系统,测试了不同幅值交流电压激励下压电梁的谐响应和瞬态响应。通过试验验证了理论分析的合理性,讨论了激励电压和阻尼对谐响应和瞬态响应的影响。结果表明:压电悬臂梁的谐响应呈非线性,具有弹簧渐软特性;压电梁的共振频率随激励电压幅值的增大而减小,在6 V、9 V、12 V交流电压激励下,压电梁的共振频率分别为55.6 Hz、54.8 Hz、54.4 Hz;当激励电压频率等于压电梁的固有频率时,其横向振幅达到峰值;当激励电压频率逐渐远离压电梁的固有频率时,其振幅则迅速降低;激励电压频率接近共振频率时梁会发生"拍振"现象;阻尼对压电梁的共振抑振作用最为明显。The vibration characteristics of a piezoelectric actuator subjected to voltage excitation are analyzed by employing the bimorph piezoelectric cantilever beam as the research object. Firstly, the forced vibration differential equation of the piezoelectric cantilever beam under voltage excitation is derived based on the energy method and thermodynamic equilibrium equation. Then, the harmonic response and transient response of piezoelectric beam excited by different amplitudes AC voltages are tested by a self-built electrical excitation vibration experiment system. Thereafter, the validity of the current theoretical model is verified through the several comparisons of the experiment results. At last, the influences of voltage excitation and damping on the harmonic response and transient response are investigated. The results indicate that the harmonic response of the piezoelectric beam exhibits the nonlinear characteristic of“softening”spring. The resonance frequency of the piezoelectric beam decreases with the increase of the voltage excitation amplitude, and it presents 55.6 Hz, 54.8 Hz, 54.4 Hz, respectively, by imposing the excitation of 6 V,9 V,and 12 V AC voltages. The transverse amplitude of the piezoelectric beam reaches its peak with the voltage excitation frequency the same as resonance frequency, and as the voltage excitation frequency gradually moves away from the resonance frequency of the piezoelectric beam, its transverse amplitude decreases rapidly. Meanwhile, the vibration behavior of“beat”occurs when the voltage excitation frequency closes to the resonance frequency. The most obvious factor on resonance suppression of the piezoelectric beam is associated with damping.

关 键 词：压电驱动器 振动特性 能量法 电压激励 悬臂梁 阻尼 

分 类 号：O321[理学—一般力学与力学基础] O327[理学—力学]