基于ScAlN/6H-SiC结构的声表面波传播特性  

Propagation Characteristics of Surface Acoustic Wave Based on ScAlN/6H-SiC Structure

作　　者：耐日嘎 马俊 王园园[1,2] 豆亚稳 吕海涛 钱莉荣[1,2] 李翠平[1,2] NAI Riga;MA Jun;WANG Yuanyuan;DOU Yawen;LYU Haitao;QIAN Lirong;LI Cuiping(Tianjin Key Laboratory of Film Electronic and Communication Devices, School of Integrated Circuit Science and Engineering,Tianjin University of Technology,Tianjin 300384,China;Engineering Research Center of Optoelectronic Devices and Communication Technology,Ministry of Education, School of Integrated Circuit Science and Engineering,Tianjin University of Technology,Tianjin 300384,China)

机构地区：[1]天津理工大学集成电路科学与工程学院,天津市薄膜电子与通信器件重点实验室,天津300384 [2]天津理工大学集成电路科学与工程学院,光电器件与通信技术教育部工程研究中心,天津300384

出　　处：《压电与声光》2022年第1期6-9,共4页Piezoelectrics & Acoustooptics

基　　金：广东省重点领域研发计划基金资助项目(2020B010104002);天津教委科研计划基金资助项目(2018KJ131);天津市科技特派员基金资助项目(19JCTPJC56200);大学生创新创业基金资助项目(201910060033,202010060137)。

摘　　要：该文采用有限元法研究了基于ScAlN/6H-SiC结构的声表面波传播特性,并分析了4种激励条件下,压电材料厚度变化对ScAlN/6H-SiC结构中声表面波相速度和机电耦合系数的影响,通过改变电极厚度及金属化率再次对机电耦合系数进行优化。结果表明,IDT/ScAlN/6H-SiC结构的机电耦合系数可达到5.4%,对应的相速度为6.36 km/s,添加短路金属后,机电耦合系数值和相速度均有所提高,Metal/ScAlN/IDT/6H-SiC结构下优化的机电耦合系数和相速度分别为15.78%和7.33 km/s。In this paper,the propagation characteristics of the surface acoustic waves based on ScAlN/6H-SiC structure is studied by using the finite element method.The influences of the piezoelectric materials thickness change on the phase velocity and electromechanical coupling coefficient of SAW in ScAlN/6H-SiC structure under four kinds of exciting conditions is analyzed.The electromechanical coupling coefficient is optimized again by changing the electrode thickness and metallization ratio.The results show that the electromechanical coupling coefficient of IDT/ScAlN/6H-SiC structure can reach 5.4%,and the corresponding phase velocity is 6.36 km/s.After adding short-circuit metal,the electromechanical coupling coefficient and phase velocity have been improved.The optimized electromechanical coupling coefficient and phase velocity of SAW in metal/ScAlN/6H-SiC structure are 15.78%and 7.33 km/s,respectively.

关 键 词：声表面波 Sc掺杂氮化铝(AlN) 6H-SIC 相速度 机电耦合系数 

分 类 号：TN384[电子电信—物理电子学] TN713