CVD金刚石膜激光平整化效率和粗糙度  

Laser planarization efficiency and roughness of CVD diamond film

作　　者：李世谕 安康 邵思武 黄亚博 张建军 郑宇亭 陈良贤 魏俊俊 刘金龙 李成明 LI Shiyu;AN Kang;SHAO Siwu;HUANG Yabo;ZHANG Jianjun;ZHENG Yuting;CHEN Liangxian;WEI Junjun;LIU Jinlong;LI Chengming(Institute for Advanced Materials and Technology,University of Science and Technology Beijing,Beijing 100083,China;Shunde Graduate School,University of Science and Technology Beijing,Foshan 528399,Guangdong,China)

机构地区：[1]北京科技大学新材料技术研究院,北京100083 [2]北京科技大学顺德研究生院,广东佛山528399

出　　处：《金刚石与磨料磨具工程》2022年第1期61-68,共8页Diamond & Abrasives Engineering

基　　金：国家磁约束核聚变能发展研究专项资助(2019YFE03100200);国家自然科学基金(5210020483);中央高校基本科研业务费(FRF-MP-20-48);北京科技大学顺德研究生院博士后科研经费(2020BH015)。

摘　　要：对化学气相沉积(CVD)多晶金刚石膜进行激光平整化的正交试验,使用场发射环境扫描电子显微镜(SEM)进行形貌分析,激光共聚焦扫描显微镜测量线粗糙度R_(a)、面粗糙度S_(a)和切缝锥度,分析激光参数对CVD膜平整化的影响。结果表明:影响切缝锥度的因素依次为脉冲宽度、脉冲频率、进给速度和激光电流,影响线粗糙度Ra的因素依次为进给速度、激光电流、脉冲频率、脉冲宽度。正交试验优化后,当激光电流为64 A、脉冲宽度为400μs、脉冲频率为275 Hz、进给速度为100 mm/min时,可获得最佳的切槽表面形貌。采用该优化参数进行面扫描,测得面粗糙度S_(a)为11.7μm;进一步增加入射角度至75°时,面粗糙度S_(a)降低至1.9μm,实际去除效率达到1.1 mm^(3)/min。The orthogonal experiment of laser planarization of CVD polycrystalline diamond film was carried out,and the morphology was analyzed by using scanning electron microscope(SEM).The surface roughness R_(a),the surface roughness Sa and the taper of kerf were measured by confocal laser scanning microscope.The influence of laser parameters on cutting quality was analyzed.The results show that the factors affecting kerf taper are pulse width,pulse frequency,feed speed and laser current in turn,and the factors affecting line roughness are feed speed,laser current,pulse frequency and pulse width in turn.After optimization by orthogonal test,the best groove surface morphology can be obtained with laser current of 64 A,pulse width of 400μs,pulse frequency of 275 Hz and feed speed of 100 mm/min.Using the optimized parameters,the surface roughness S_(a)was measured to be 11.7μm.When the incident angle increased to 75°,the surface roughness Sa decreased to 1.9μm,and the actual removal efficiency reached 1.1 mm^(3)/min.

关 键 词：CVD金刚石膜 激光平整化 面粗糙度 机械研磨 

分 类 号：TQ16[化学工程—高温制品工业]