高折射率镀膜聚合物波导传感器的制备  

Preparation of high-refractive-index film coated polymer waveguide fiber sensor

作　　者：谭冰 蔡斌[1] TAN Bing;CAI Bin(School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China)

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093

出　　处：《光学仪器》2022年第1期87-94,共8页Optical Instruments

基　　金：上海市自然科学基金会面上项目(20ZR437400)。

摘　　要：为了提高利用倏逝波传感的光纤传感器的灵敏度问题,仿真并验证了一种基于高折射率镀膜的光纤传感器。首先两根光纤之间利用激光诱导波导自行成技术形成聚合物波导,并在波导表面镀上一层高折射率Ta_(2)O_(5)薄膜以增强波导表面倏逝波强度,从而增加传感器灵敏度。根据聚合物波导制备结果,使用COMSOL Multiphysics■软件对Ta_(2)O_(5)的厚度进行优化和仿真,并根据此仿真结果选取70,100和150 nm3种厚度制备高折射率镀膜聚合物波导传感器。光谱测量结果表明,Ta_(2)O_(5)膜在100 nm厚度下,该传感器对罗丹明B水溶液可获得吸收光谱1×10^(-8) g/mL的检测极限。该传感器具有成本低、体积小、制作简单、灵敏度高的优点,在各个领域拥有广阔的应用前景。To improve the sensitivity of optical waveguide sensor based on evanescent wave sensing,a kind of high-refractive-index film coated waveguide optical fiber sensor is proposed by simulation and verified by experiment.In this study,we propose an optical fiber-waveguide-fiber EF sensing platform,which composes of a Ta_(2)O_(5) coated polymer waveguide sandwiched by two multimode optical fibers,to enhance the intensity of evanescent wave and increase the sensitivity of the sensor.Through simulation results,the Ta_(2)O_(5) film thickness was optimized.We selected 70 nm,100 nm and 150 nm thickness for the coating experiments.With the coating thickness of 100 nm,we achieved absorption spectrum limit of detection for Rh B of 1×10^(-8) g/mL.The sensor has the advantages of low cost,small volume,simple manufacture and high sensitivity,which can be widely used in various fields.

关 键 词：Ta_(2)O_(5)镀膜 COMSOL Multiphysics■ 聚合物光波导 倏逝波传感 

分 类 号：O439[机械工程—光学工程]