微型气相色谱柱芯片研究进展  

Research progress of micro gas chromatography column chip

作　　者：张海燕 赵斌 曹可 李磊[2] 郑丹 冯飞[2] ZHANG Haiyan;ZHAO Bin;CAO Ke;LI Lei;ZHENG Dan;FENG Fei(School of Chemical and Environmental Engineering,Shanghai Institute of Technology,Shanghai 201418,China;State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China)

机构地区：[1]上海应用技术大学化学与环境工程学院,上海201418 [2]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050

出　　处：《传感器与微系统》2022年第3期1-6,11,共7页Transducer and Microsystem Technologies

基　　金：国家重点研发计划资助项目(2018YFA0208504);中国科学院战略性先导科技专项(A类)项目(XDA22020504);国家自然科学基金资助项目(61805269)。

摘　　要：微型气相色谱仪可对复杂气体组分进行现场、实时、快速地定性和定量分析。微型气相色谱柱芯片作为微型气相色谱仪的核心部件之一,决定了其分离性能的好坏。微机电系统(MEMS)技术的发展为制造微型气相色谱柱芯片提供了有效的加工技术、可灵活选择的衬底材料,甚至可以通过MEMS技术制备均匀的固定相,从而获得具有更好分离性能的微型气相色谱柱芯片。综述了近年来基于MEMS技术的微型气相色谱柱芯片的研究进展,内容主要涉及微型气相色谱柱芯片的微沟道加工技术、柱内结构、芯片衬底材料以及固定相的制备方法等方面。Micro gas chromatograph can carry out on-site,real-time and rapid qualitative and quantitative analysis on complex gas components.Micro gas chromatography column chip,as the core of the micro gas chromatograph,determines its separation performance.The development of micro-electro-mechanical system(MEMS)provides effective processing technology to fabricate micro gas chromatography column chips,and flexible selected substrate materials.In addition,uniform stationary phase can be prepared by MEMS technology,which is helpful to obtain micro gas chromatography column chips with better separation performance.Research progress of micro gas chromatography column chips based on MEMS technology in recent years is reviewed.The content mainly involves the microchannel fabrication technology of micro gas chromatography column chip,internal structure of column,substrate material of chip and the preparation method of stationary phase.

关 键 词：气相色谱 微机电系统 微型气相色谱柱芯片 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] O658[自动化与计算机技术—控制科学与工程]