跨层叉指换能器对复合膜SAW器件影响的研究  

Study on influence of cross layer interdigital transducer on composite film SAW device

作　　者：李志鹏[1] 孟旭 王博男 张超 LI Zhipeng;MENG Xu;WANG Bonan;ZHANG Chao(Transportation College,Northeast Forestry University,Harbin 150040,China)

机构地区：[1]东北林业大学交通学院,黑龙江哈尔滨150040

出　　处：《传感器与微系统》2022年第3期32-35,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金面上资助项目(52175497);中央高校基本科研业务费专项资金项目(2572019CP04,2572018AB29)。

摘　　要：利用COMSOL有限元软件建立了复合膜声表面波(SAW)器件结构,并将通常使用的平面叉指换能器(IDT)更新为跨层布局形式。通过COMSOL软件对新结构进行了模态分析与频率响应分析,计算了机电耦合系数,研究了异性电极间距与同性电极间距的改变对复合膜SAW器件产生的影响。结果表明:跨层IDT布局形式,可以在现有制备条件与水平不变的前提下,大幅度降低器件尺寸,提高特征频率。The structure of composite film surface acoustic wave(SAW)device is established by using COMSOL finite element software,and the commonly used planar interdigital transducer(IDT)is updated to cross layer layout.The modal analysis and frequency response analysis of the new structure are carried out by COMSOL software,the electromechanical coupling coefficient is calculated,and the influence of the change of heterosexual electrode spacing and homosexual electrode spacing on the composite film saw device is studied.The results show that the cross layer IDT layout can greatly reduce the device size and improve the characteristic frequency on the premise that the existing preparation conditions and levels remain unchanged.

关 键 词：声表面波 复合膜结构 叉指换能器 跨层布局 COMSOL软件 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH89[自动化与计算机技术—控制科学与工程]