基于AlN的压电MEMS超声换能器阵列  

Piezoelectric MEMS ultrasonic transducer array based on AlN

作　　者：王强[1] 杨婷婷 薛小斌 臧俊斌[1] 张增星[1] 薛晨阳[1] WANG Qiang;YANG Tingting;XUE Xiaobin;ZANG Junbin;ZHANG Zengxing;XUE Chenyang(Key Laboratory of Instrumentation Science and Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《传感器与微系统》2022年第3期51-53,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金委重大科研仪器项目(61727806);2020年度山西省研究生教育创新项目(2020 BY101)。

摘　　要：针对目前超声换能器机电耦合系数较低的问题,本文设计了一种以氮化铝(AlN)为压电材料的微机电系统(MEMS)超声换能器阵列以提高机电耦合系数。在COMSOL Multiphysics中用模态分析确定了超声换能器工作在一阶模态下有最大的声场输出,并给出了其声场传播示意图。通过对超声换能器在工作状态时的应力分析,计算出当上电极半径为空腔半径的70%时,超声换能器有最大的发射声场效率。用网络分析仪对超声换能器的阻抗曲线进行测量,从中推导出其机电耦合系数为1.6%,展现出良好的工程应用前景。Aiming at the problem of low electromechanical coupling coefficient of current ultrasonic transducer,a MEMS ultrasonic transducer array using AIN as piezoelectric material is designed to improve the electromechanical coupling coefficient.The modal analysis is used to determine that the ultrasonic transducer has the largest output of sound field in the first mode in COMSOL Multiphysics,and the schematic diagram of its sound field propagation is given.Through the stress analysis of ultrasonic transducer in working state,it is calculated that when the upper electrode radius is 70%of the cavity radius,the ultrasonic transducer has the maximum emission sound field efficiency.The impedance curve of ultrasonic transducers is measured,and the electromechanical coupling coefficient is deduced to be 1.6%,showing good prospect of engineering application.

关 键 词：压电超声换能器 有限元分析 模态分析 应力分析 阻抗测试 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TB565.1[自动化与计算机技术—控制科学与工程]