血压计用MEMS压力传感器设计与制造  

Design and manufacture of MEMS pressure sensor forsphygmomanometer

作　　者：彭时秋 朱赛宁 肖步文 PENG Shiqiu;ZHU Saining;XIAO Buwen(Wuxi KI Electronics Co Ltd,Wuxi 214000,China)

机构地区：[1]无锡中微晶园电子有限公司,江苏无锡214000

出　　处：《传感器与微系统》2022年第3期79-82,共4页Transducer and Microsystem Technologies

摘　　要：针对微机电系统(MEMS)压力传感器灵敏度及线性度较难兼顾的问题,设计了一种可应用于电子血压计量程为40 kPa的MEMS压力传感器。首先基于硅压阻式MEMS压力传感器的工作原理,使用COMSOL Mutilphysics软件对传感器结构进行仿真设计,根据理论计算各结构尺寸,得到可获得最高输出灵敏度以及最小非线性的电阻位置,并设计传感器掩模版图。同时设计了传感器芯片工艺制备流程,完成了高灵敏度压力传感器芯片的制作,并对最终成品性能进行了研究分析。实验结果表明:通过对压力传感器结构优化,研制出的40 kPa硅压阻式MEMS压力传感器在常温下的灵敏度达到0.445 mV·V^(-1)·kPa^(-1),非线性度达到±0.0736%FS。A micro-electro-mechanical system(MEMS)pressure sensor with a range of 40kpa is designed to solve the problem of sensitivity and linearity of MEMS pressure sensor,which can be used in electronic sphygmomanometer.Based on the working theory of the silicon piezoresistive MEMS pressure sensor,the COMSOL Mutilphysics software is used to simulate the sensor structure.The dimensions of each structure are calculated based on the theory to ensure the location to obtain maximum output sensitivity and minimum nonlinearity.The layout of the sensor and the wafer manufacturing process are designed.The high-sensitivity pressure sensor chip is fabricated by MEMS process.Finally,the parameters of the packaged products are tested and analysed.The experimental results show that by optimizing the structure design of the pressure sensor,the sensitivity of pressure sensor at room temperature reaches 0.445 mV·V^(-1)·kPa^(-1),the non-linearity reaches±0.0736%FS.

关 键 词：压阻式微机电系统压力传感器 COMSOL Mutilphysics软件 灵敏度 非线性度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]